Low Temperature Sintering PZT Based Piezoelectric Ceramics And Its Application

In this paper,PZT（Zr/Ti=52/48）piezoelectric ceramic materials were studied,The Pb_1-xSm_x(Zr_0.52Ti_0.48)_1-x/4O₃ piezoelectricceramicmaterialswerepreparedby conventional solid-phase sintering method.The materials were characterized and analyzed using X-ray diffractometer（XRD）,scanning electron microscope（SEM）,Agilent4284A precision impedance analyzer and YE2730 d₃₃3 tester.Effect of Sm₂O₃doping and sintering temperature on microstructure,dielectric and piezoelectric properties of PZT piezoelectric ceramic materials were studied,and the effect of the addition of the sintering agent LBBS and LMZBS glass on sintering temperature of PZT piezoelectric ceramics material was studied at the same time.In the end,the sintering temperature was reduced and the PZT（Zr/Ti=52/48）piezoelectric ceramic material with good comprehensive performance was obtained.The results show that the appropriate amount of Sm₂O₃ can improve the dielectric and piezoelectric properties of PZT piezoelectric ceramics.With the increase of Sm₂O₃doping,the inherent perovskite structure of the piezoelectric ceramic havn’t changed,the content of the rhombohedral crystal phase decreased at the MPB,and the MPB is moving towards the tetragonal crystal phase.As the situation of the microstructure of ceramics,the incorporation of Sm₂O₃ inhibited the growth of the ceramic grain and reduced the grain size.The best dielectric properties were obtained at the Sm₂O₃ doping amount of x=0.06:ε_r=1476.751,tanδ=0.031;The optimal piezoelectric properties were obtained at the Sm₂O₃ doping amount of x=0.03:d₃₃=333pC/N,K_p=0.524.The introduction of LBBS and LMZBS glass can greatly reduce the sintering temperature of piezoelectric ceramics.The introduction of LBBS glass prompt the compact and uniform growth of piezoelectric ceramic grains at lower temperature.With the increasing of LBBS,the densification degree of ceramic was gradually increased,and the grain size was more uniform.The introduction of LBBS optimized the dielectric properties of the piezoelectric ceramics,but also made the piezoelectric properties deteriorate.Under the 850℃sintering temperature,at the place of LBBS addition amount for 1wt%,Sm₂O₃ doping amount of x=0.03 to get the best comprehensive performance:the relative density is 93.8%,ε_r=1284.6,tanδ=0.025,d₃₃=315pC/N,K_p=0.519.And under the 850℃sintering temperature,at the place of LMZBS addition amount for 1wt%,Sm₂O₃ doping amount of x=0.06 to get the best comprehensive performance:the relative density is 92.6%,ε_r=1286.7,tanδ=0.029,d₃₃=263pC/N,K_p=0.463.Based on the fabricated materials,a LTCC accelerometer was designed and simulated using the COMSOL Multiphysics 5.2 software.Its structure size is 15mm x15mm x 2mm,resonant frequency is 11.2kHz,and the sensitivity is 6.69mV/g.