Research On Methods Of Calibration For The Contact And Non-contact Hybrid Surface Topography Measurement Instrument

In order to solve the traceability problem of the measuring instrument,the surface structure should be consistent with the manufacturing quality system,so the calibration is required for the measuring instrument.In recent years,a number of efforts have been made in the international standardizations of the field of surface topography measurement,such as the creation of ISO 25178 series standards,which include the representation of regional surface topography measuring instruments and the representation of nominal features.On the basis of summarizing the existing research results at home and abroad,this thesis systematically studies the scale calibration method of the key performance indicators of surface topography measuring instruments,and takes the contact and non-contact hybrid surface topography measurement instrument as an example.The research contents are as follows :(1)In order to effectively remove the noise in the contact and non-contact hybrid surface topography measurement instrument calibration on the regional surface morphology measurement results,the average method and the subtraction method were used to analyze in the instrument contact and non-contact measurement their noise value.(2)When calibrating,the surface of the reference plane will be superimposed on the surface topography of the measured object.In order to solve this problem,repeated measurements were made at different positions in the standard plane,and the average topography was obtained.The obtained average topography was subjected to the twelve order polynomial separation method and the threshold method to obtain the residual flatness,and in the contact and non-contact two measurement principles share a reference plane in the case of the measurement results for predictive analysis.(3)In order to calibrate the coefficient,linearity and squareness of the contact and non-contact hybrid surface topography measurement instrument in XYZ three coordinate axes,the contact and non-contact parts of the measuring instrument were used for different step height artefact and cross grating measuring the measurement of the measurement of the design,while the extended of the Z-axis scale calibration method made a brief introduction.(4)The research status of the resolution finished by the international standard organization and the research institution were described.The resolution of the contact and non-contact hybrid surface topography measurement instrument was analyzed,Based on the ASP material measure and the image process,a method of resolution calibration based on a dual-use surface topography instrument was proposed.