| As a core component of the exposure system, the projection object lens system for photolithography must have high precision. The commonly used analysis methods performed the structure, thermal analysis, optical analysis related to the optical lens with professional software. But the interaction of the model and data between different software may cause some data missed, which causing the deviation of the analysis result. Therefore a kind of method of thermo-opto-mechanical integrated analysis for optical lens to complete various types of data exchange and realize the whole analysis process of the lens is necessary, shorten the design cycle.This thesis briefly introduces the mechanical structure analysis, thermal analysis, optical analysis process of optical lens and detailed the coupling relationship among them, putting forward some methods which are proposed to evaluate the integrated analysis results of thermo-opto-mechanical. Thus raising a kind of method to realize integrated analysis of thermo-opto-mechanical:Integrated analysis procedure based on ModelCenter,in addition, design the auxiliary software in C++Builder development environment to improve the function of procedure analysis.According to the proposed scheme,establish the parameterized analysis model of the lens of thermo-opto-mechanical and parameterized integrated analysis of process of the lens of thermo-opto-mechanical based on ModelCenter. Complete the data interaction among different types of analysis during analysis process and process automation and get the lens optical characteristic analysis chart. At the same time, the designed auxiliary software improves the process of the integrated analysis function and provides a convenient interface for analysis process of lens. Users set up and modify some parameters in the process of analysis according to the requirements, and select the appropriate type of analysis,users can view the corresponding analysis results directly when run to the end. |
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