Finite Element Analysis And Comparison Of The Principle And Performance Of QCM Sensor And FBAR Sensor

With the increase of breadth and depth of exploring natural world by human,human,the requirements for the measurement precision of micro mass and its variation get higher and higher in physics,chemistry,biology and other fields.Therefore various sensors have emerged.As two new micro-measurement sensors based on the principles of the Bulk Acoustic Wave Resonator,Quartz Crystal Microbalance(QCM)sensors and Film Bulk Acoustic Resonator(FBAR)sensor have become research hotspots.The theoretical basis of two sensors is piezoelectric effect.When the crystal is in alternating electric field,it will resonate and the resonant frequency is related to the crystal quality.If there is physical adsorption on the crystal surface,Mass change will change the resonant frequency,and result in a frequency shift.Thus we can measure the frequency shift to get the mass change on the crystal surface.Since the frequency shift is sensitive to mass changes;it can achieve the nanogram level or even higher and suitable for measuring micro amounts.It is difficult to observe the real micro vibration of high frequency by the existing observation means,because the resonant vibration frequency of two types of sensor can achieve MHz or GHz,the amplitude is only a few micrometers or even nanometers,the analysis and design of the measurement system using QCM sensor and FBAR sensor can only stay in the theoretical analysis,limited further development and application of two kinds of sensors,also increased the difficulty of analysis measurement results of two types of sensors.In order to reveal the principle and affecting factors of the performance of the two kinds of sensors deeply and directly,this study introduced the finite element analysis software ANSYS.With the finite element analysis method,multi-faceted simulations of the QCM sensor thickness shear vibration mode in AT cut and FBAR based on ZnO film sensor model were established and analyzed in ANSYS Workbench software platform.The first step for this paper was using the piezoelectric equation theory to analyze the measurement principle of QCM sensor;secondly,a simulation model of QCM sensor in ANSYS is established and based on the model,the influence on the QCM sensors performance by using electrode and clamp was detailed analyzed;thirdly,a FBAR model based on ZnO film was created and the principle was analyzed by simulation;finally,through the consult a large number of literatures,we compared and analyzed the QCM and FBAR from the working mechanism,properties and applications.This study provided a reference for further understanding and application of QCM sensor and FBAR sensor in simulation analysis,and provided new means and methods for the analysis and design of measurement system based on the two kinds of sensor.