Research On Three Dimensional Microscopic Measurement Technology Of Automatic Focus Variation

As a new non-contact surface topography measurement technology, 3D microscopic measurement technology of automatic focus variation has the characteristics of high measuring accuracy, wide measuring range, retaining the original color of the object. It is suitable for measuring the inclined plane with large dip angle. It has important scientific value and wide application prospect.It is impossible to completely focus on micro samples due to the limited depth of field of the microscope. In order to obtain 3D surface of microscopic samples, 2D image sequence will be captured. This paper proposed the optimized focusing evaluate function. The focused regions of image sequences will be extracted using the optimized function. And then every focused region will be synthesized to one full focus image with the method of wavelet fusion based on segmentation. According to the result of focusing evaluate and the initial height of each pixel of the image, Gauss interpolation is used to get accurate height of the pixel. And then reconstruct the 3D shape of the object surface according to the 2D full focus image and the height map. Finally, the measurement of 3D surface topography and characteristic parameters is realized.