Research On Simulation, Fabrication And Test Of Frequency Selective Surfaces

Frequency selective surface(FSS) is a periodic flat two-dimensional array structure, and its nature is an electromagnetic spatial filter. When frequency selective surface is interacted with electromagnetic waves, it exhibits significant band-pass or band-stop electromagnetic wave transmission characteristics. FSS has good frequency selection and polarization selection features, so it can effectively control the transmission and reflection of electromagnetic waves. With the continuous progress and development of technology, frequency selective surface has been increasingly used in the fields of microwave, infrared wave and visible light.In recent years, many academic and research institutions at home and abroad did intensive research and analysis of frequency selective surfaces, and characteristics of frequency selective surfaces was also tended to improve understood.In this paper, frequency selective surfaces were studied: we simulated 118 GHz frequency selective surface and 183 GHz frequency selective surface by using CST MWS software, and simulated the relationship between frequency response characteristic with their line width, period length, structure thickness and shim thickness. 118 GHz frequency selective surface and 183 GHz frequency selective surface were fabricated by using UV-LIGA technology, and the samples were tested. The line width, period length and structure thickness of the samples were measured through SEM(scanning electron microscope). At the same time, the transmission and reflection characteristic of 118 GHz frequency selective surface was tested by near-field scanning method. The test results proved that, when the quality of the samples meets the requirements, the samples using UV-LIGA technology processing had good dimensional characteristics and steep sidewalls. The line width error of 118 GHz frequency selective surface sample was ±0.6 μm, the period length error was ±2 μm, and the structure thickness error was ±1 μm. For 183 GHz frequency selective surface, the line width error was ±2.7 μm, the period length error was ±2 μm, and the structure thickness error was ±1 μm.