Long Stroke Precision Stage Control System Design

As the development of precision machining, which demands higher precision and longer range of. Common workbench can not take into account both large stroke and high precision. Coarse and fine two-stage driven workbench uses the laser interference fringes as its measuring reference, so that it could have the large measurement range, the high measurement accuracy and the high resolution; using motor and piezoelectric ceramic as the driving source to achieve long range and high resolution displacement output. This paper focuses on the research on the positioning control of macro and micro two-stage driven workbench and develops a kind control system of macro and micro two-stage driven workbench, the main work of the thesis is as follows:1. The driving circuit of piezoelectric ceramic is designed.2. The laser interference displacement metering hysteresis interval compensation algorithm is designed, which suppresses the effect of noise on counting accuracy effectively.3. The closed-loop positioning control algorithm based on PID is designed. The PID control parameters are adjusted by using critical proportional method.4. The positioning experiment is carried out to verify the accuracy of workbench positioning.