The Basic Study Of SOI Optical Switch Array

SOI(Silicon-On-Insulator)is silicon on insulator,because of its high temperature,low voltage,low power circuit,with excellent performance sensors and photoelectric integration;it is "silicon based circuit technology" in twenty-first century.At the same time,SOI(silicon-on-insulator)optical switch the material is compatible with traditional silicon technology,it can realize the integration of photoelectric switch,fast response time,low cost and exquisite processing technology.And it becomes a promising semiconductor material widely used around the world.Therefore,it can not only make the devices compact delicate and sensitive,but also provides a very a good platform for the realization of optoelectronic integrated in CMOS microelectronics technology.In this thesis,SOI optical switch is designed and simulated as his research direction,focusing on the switch unit after optimization based on Modeling and Simulation of optical switch array.The optical switch in the preparation process has a certain difficulty,so this thesis,we mainly simulated the coupler,optical switch and large-scale optical switch array by using the beam propagation method,the main research contents include:(1)2×2 SOI optical switch unit is designed and simulated of Optiwave Company,and we simulate the MZI type optical switch unit by using BPM from the interference optical switch structure and the principle(2)We studied 2×2 SOI electro-optic switch,the carrier dispersion effect and its characteristics of the SOI electro-optic switch.(3)We constructed and analyzed 4×4,8×8,16×16 MZI SOI optical and electro-optical switch array based on the optimization.