The Design And Preparation Process Of Medical Optical Filters And High-reflection Films In Visible Light

Optically functional films are widely used in many fields of optoelectronics industry, national defense, environmental science, broad market prospects, etc. In this paper, two optical thin films which contain narrowband filter and a high reflection film has been studied. Through design of the thin film and the optimization of preparation process, we made some valuable results. The main work of this paper is as follows:Firstly, for medical narrowband filter, we designed a narrow-band filter, which conforms to the requirements(530 ± 20 nm @ T> 92%, and the transmission of the rejection zone less than 0.5%), based on the basic structure of Fabry- Perot etalon band pass filter and the TFCalc film system design software. And we successfully prepared the narrowband filter with RF ion beam sputtering technique.Secondly, for high- reflection film can be used in the visible band. We studied a number of high-reflective multilayer dielectric film, and designed the high reflectivity film system in the wave band of visible light( 400-760nm), which conforms to the requirements(incident angle is 24 °, R> 92 %), with the TFCalc film system design software. We prepared various films by ion beam and electron gun thermal evaporation deposition technique, and studied the effect of the different tooling values and different high refractive on the optical properties of high-reflection films.