Micro-object Manipulation Method And Experimental Research Based On Liquid Adhesion And Piezoelectric Vibration Assistance

Micro-nano scale objects are the most widely used targets in micro-electromechanical systems.The micro-nano-scale targets are micro-sized objects ranging from millimeter to nanometer range,such as microcapsules and macromolecule microspheres,biomedical research.Cell,nuclear pellets for laser fusion,a wide variety of MEMS microsensor chips,and optical communications.With the continuous development of micro-operation technology and the continuous reduction of the scale of the object being manipulated,it poses a higher challenge to the theoretical methods and technical research of micro-operation.The micro-scale sticking problem is one of the most important difficulties in the field of micro-operation.When the size of the object to be manipulated enters the microscale range,some adhesion,including van der Waals forces,electrostatic forces,capillary forces,etc,play a leading role due to the scale effect and the surface effect.After the picking operation,the smooth release of the object is the most critical problem in the operation process.In order to realize the operation transfer of micro-object below 100 ?m,a micro-object operation method based on capillary action and piezoelectric vibration is proposed in this paper.The feasibility of picking micro-object based on capillary force and the feasibility of releasing micro-object based on piezoelectric vibration are analyzed.Finally,the reliability of the method is verified by experiments.In this paper,the adhesion between micro-objects and tools and micro-objects in the presence of liquid medium is studied and analyzed,and the typical adhesive contact force model is analyzed.Then the picking adhesion model is numerically simulated to analyze the effect of the parameters on the microfacies picking up the microfacies.Then,the micro-object force model is established based on the microscopic object picking adhesion model.The dynamic equilibrium equation of the micro-object is established.Finally,SIUMULINK tool is used to simulate the external force and characteristic distance in the process of release,and a series of suitable dynamic parameters are obtained.Finally,based on the micro-operating system architecture requirements and micro-operational strategy,a micro-object operation experiment platform based on capillary adhesion and vibration friction is designed and integrated.The proposed pick-up model and release model A series of comparative experiments were carried out on the relevant parameters involved in the simulation analysis of the model.Several experiments were carried out on the release process of the micro-object.Finally,the optimal dynamic parameters were selected to pick up and release the micro-And the effect of the operation on the micro-object's release success rate and precision were studied.The data were also statistically analyzed.The experimental results show that the proposed method can pick up,transfer and release small objects smoothly and reliably,and has a good success rate and a high accuracy of displacement.The micro-object manipulation method based on micro-liquid and piezoelectric assisted action provided by this paper is a new idea and reference method for micro-object operation using capillary adhesion and micro-friction.Technology and practical application of the theory provides some reference.