Modeling And Simulation Of The Effects Of Weak Force On MEMS Torsional Micro-nanoscopes

In order to make the wide application of the torsional micro-nano-mirror,we must understand the characteristics of the micro-nano-mirror,and overcome the shortcomings and deficiencies of the current model of micro-nano-mirror.To achieve the purpose of improving micro-nano-mirror's performances,the current analytical model of the micro-nano-mirror is analyzed and improved:(1)After considering the bending effect of the torsion beams,the bending couple model of the micro-nano-mirror driven by electrostatic force is established to take account of Casimir force.This model is for the situation of micro-nano-mirror when plate spacing small.In order to understand the model limitation,static torsion-bending coupled model of the micro-nano-mirror considering van der Waals force and Casimir force driven by electrostatic force is proposed.(2)The correctness of the theory of the model is analyzed through the numerical simulation.The Casimir force effect on the micro-nano-mirror is analyzed,then analysis of the influence of van der Waals force and Casimir force on micro-nano-mirror is conducted and compared with the previous models.The result shows the model considering van der Waals force and Casimir force extends the scope of application.(3)On the basis of static torsion-bending coupled model of the micro-nano-mirror considering van der Waals force and Casimir force driven by electrostatic force,the temperature effects of the static characteristics of torsional micro-nano-mirror were presented.Through numerical simulation,temperature effect of the micro mirror static characteristics is analyzed finally.In this paper,the research on the static characteristics of the micro-nano-mirror provides a reference and help for the application of the micro-nano-mirror.And it provides a good theoretical guidance of the improvement on the model and the influence of the temperature.