The Design Of Low Loss Broadband Super-lens With Graphene Metamaterials

To achieve high resolution patterns at the imaging plane of super-lens,we developed a far-field optical lithography system.Firstly,the transformation optics method was employed for designing the demagnification super-lens system.Secondly,we proposed a novel nanolithography model with super-lens-photoresist-graphene layer structure to enhance the evanescent wave of electric field intensity distribution delivered by the transversal magnetic polarization wave.We use finite element method to analyze performance of the super-lens combining with multilayer structure and graphene back reflector.Numerical simulations indicate the lithographic resolution can reach to 50 nm,demonstrating the ability of nanolithography by this method.The first chapter describes the research background and significance of metamaterial super-lens at home and abroad,exposed summarized its bottleneck problem through the current developments and trends.Analyzes its superiorities compared with other research methods.The second chapter introduces the principle and characteristics of metamaterial,illustrates the mechanism of optical transformation and the effective medium theory to describe between micro structures and macro performance requirements of design and calculation method the metamaterial super-lens.The third chapter introduces the mechanism of superlens,which image resolution was enhanced by the plasmon spoused by metamaterial.Transmission matrix,FDTD and FEM simulation method and its related theory are also illustrated to validate the electromagnetic properties of metamaterial.The permittivity and permeability are described by drude model and the loss feature was obtained through the S parameter method.Chapter four presents the FEM simulation results of the metamaterial graphene superlens system,and then analyzes these results.The results verify the super-lens can improve the design scheme.The last chapter summarizes the work that has been done,points out some remaining issues and work for future study.