Study On The Micro Area Analysis Technique Of Excimer Laser Induced Breakdown Spectroscopy

Laser induced breakdown spectroscopy(LIBS)is a kind of detection technology based on atomic emission spectrum coming from the plasma which is excited from the sample by high-energy focused laser beam.It's widely used in geological mining exploitation,archaeology,biology,medical and other fields because of its advantages including in situ,fast,high precision and without complicated sample preparations.LIBS technique can be used to implement micro area analysis of surface element distribution,because its characteristics of multi-element detection at the same time and it can realize the function of micro area detection.Excimer laser is appropriate excitation source of microanalysis of LIBS due to the advantages of short wavelength and low heat effect.In this paper,ArF excimer laser is used as the excitation source,and the characteristics of excimer LIBS detection are analyzed.An instrument of micro area scanning by excimer LIBS was set up.The main contents include:(1)The characteristics of excimer laser LIBS were studied by experiments,especially the characteristics of time delay and plasma excited by excimer laser.And the quantitative analysis feature of excimer laser LIBS was researched by experiments.(2)An excitation source of excimer laser LIBS was set up.The light path of excimer laser was designed and adjusted.The system can provide high quality excitation source of excimer laser LIBS with adjustable focused light spot and energy density.(3)The micro area scanning analysis system of excimer laser LIBS was set up,and compiled the necessary control and analysis software based on Labview.The system realized functions of micro-scanning analyze and showing the element distribution.(4)The typical samples was tested by the self-made system of micro area scanning analyze to explore the influence factors of system stability and the element distribution map,in order to improve the reliability of this system.The technical characteristics of excimer laser LIBS were known through experiments,and we received good results of quantitative analysis.The system of micro-scanning analyze can realized stable micro-scanning analysis and draw elements distribution,which were based on excimer laser LIBS.The preliminary functions of micro-scanning were achieved by the system of excimer laser LIBS,and it has better application prospects in the future,such as in the field of mining and biological analysis.