Design And Optimization Of Optical Microdisk Resonators For Stimulated Brillouin Scattering

Ultra-high Q whispering gallery modes can be guided in microdisk resonators,which can be used to realize low-threshold lasers,high-sensitivity sensors and strong light-matter interaction.In this thesis,aimed at the realization of stimulated Brillouin scattering(SBS)in microdisks,related theoretical and experimental work is carried out.Using the finite difference time domain method,the effects of thickness,sidewall angle,and structural parameters of cylindrical and truncated-cone pedestals on the characteristics of the whispering gallery modes are calculated,and the physical mechanisms of these effects are analyzed.Through calculating the optical and the mechanical modes in microdisks,a silicon nitride microdisk resonator is designed for realizing SBS in it.The microdisks with radius of 29?m and 30?m can be frequency matched with a mechanical sound mode supported in the microdisk.Process for preparing silica microdisk resonators with a support pedestal and a diameter of several hundred micrometers to several millimeters is explored,and the microdisk preparation and the microscopic observation of morphology are completed.At last,on-chip SOI microdisk resonators with a coupled bus waveguide are designed,and the preparation of the microdisks and the test of their transmission spectra are implemented.Work in this thesis may provide a useful reference for the realization and utilization of SBS in microdisks in understanding the characteristics of microdisk resonators and mastering microdisk's design and processing methods.