Studies On Design And Manufacturing Technology Of Microlens Array

With the development of modern optics and improvement of optical manufacturing technology,the important development directions of optical element are miniaturization,integration and multi-function.Microlens array has been paid more and more attention by researchers because of its small size,light weight and high integration.This paper is based on the optical characteristics of microlens array to design and apply it to imaging and non-imaging optical systems.At last,the microlens array is processed by single point diamond turning technology.First,the theoretical basis of designing and processing microlens array are introduced.The theoretical foundation for the later design is achieved by analyzing the ray theory of the microlens array and the principle of the beam homogenizer of the microlens array.Simultaneously,the processing technology of micrlens array is described in detail,and the problems encountered in the process of machining microles array are solved.Secondly,the design of microlens array is completed.The first part is to design the microlens array of circular aperture and square aperture which are based on the characteristics of microlens array.Then the results are verified by software Matlab.The second part is the application of the microlens array of circular aperture to the electronic endoscope which is to design the high definition electronic endoscope objective optical system by Zemax software.The FOV of the designed electronic endoscope is 110°.The modulation transfer function values of the whole system are 0.36 at the spatial frequency of 120lp/mm,which is approaching to the diffraction limit,and is to meet the use of medical treatment.The third part is to apply the microlens array of square aperture to the laser beam shaper.In this design,the uneven distributed Gauss beam is transformed into the flat top rectangular beam while ensuring energy transmission efficiency.The new optical system controls the inhomogeneity of the beam below 7%.The optical property of microlens array is fully used while the field of application of laser beam is expanded.Last,the processing of microlens array is achieved by Fast Tool Servo of ultra precision single point diamond turning.The length of array is 4.165 mm,the average sagittal height is 0.145 mm,the surface roughness is controlled within 10 nm.These results are got by the detection of Stylus Profiler and White Light Interferometer.It can be seen that the surface profile is basically consistent with the theoretical value,and the value of surface roughness is also controlled within the acceptable range.