Study On Microwave Micro-plasma Circular Array Source Based On Microstrip Resonator

Microwave micro-plasma is a kind of micro-plasma which is excited by microwave discharge,and its discharge size is on the order of millimeters or micrometers.Compared with traditional plasma sources,the microwave micro-plasma source is characteristic of small size,low cost and easy being integrated.In addition,it has the advantages of microwave plasma,such as lower required discharge voltage,long life,high electron density and good stability.However,the size of the micro-plasma excited by a single microwave micro-plasma source is too small to meet applications under specific conditions.Therefore,it is of great significance to study the microwave micro-plasma array source.The microwave micro-plasma circular array source based on microstrip resonators is studied in this thesis.According to the principle of microstrip resonator,the 12-units microwave micro-plasma circular array source with a coupling loop operating at 2.45 GHz is designed by using the HFSS.The influences of relative factors on the performance of microwave micro-plasma circular array source are studied,and the approaches to improving the uniformity of microwave micro-plasma circular array are proposed.The research shows that the length and width of ground patch and feed point postion have effects on the resonant frequency and S parameter,and vertical double-feeds and covering PTFE film can improve the uniformity of micro-plasma circular array.Finally,the micro-plasma circular array source is fabricated with optimized simulation.The single-feed experimental results at atmosphere in Ar show that 1 unit of microwave micro-plasma circular array is ignited when the input power is 11.45 W,2 units are ignited when the input power increases to 13.69 W.While the input power is reduced to 3.24 W,2 excited units are extinguished.The work can be contributed to the further research of microwave micro-plasma circular array source.