Experimental Research Of Uniformity Characteristics On Atmospheric Pressure Plasma Jet Arrays

The rapid development of atmospheric cold plasma discharge technology has promoted the array type atmospheric pressure cold plasma jet technology to become one of the hot spots in the field of plasma science and technology research in the world in recent years.The main advantages of this technology are: low breakdown voltage,high density of active particles generated,long jet length,easy installation and disassembly,reusability,and good robustness.The above advantages not only greatly enhance the advantages of atmospheric pressure discharge technology in the application of surface modification technologies such as thin film deposition and vapor deposition,but also broaden its application prospects in the field of environmental engineering and health care,and further deepen the differences The deep integration and exchange between disciplines is of great significance to the development of atmospheric pressure plasma discharge theory and technology.In this development process,the technology is also facing some emerging challenges.Among them,the problem of plasma inhomogeneity near the surface of the material to be treated in the downstream work area of the array type atmospheric pressure cold plasma jet is a problem to be solved.In this dissertation,three different array-type atmospheric cold plasma jet structures are studied for the array-type atmospheric cold plasma jet technology and uniformity problems: 1 parallel dual-tube array structure;2 honeycomb-type 7-tube array structure;3 linear 7-tube array structure.These structures use different combinations of identical electrodes to form different arrays,which can be used as a primitive component for realizing a large-scale jet source in the future.Through the overall shape modulation of the generated jet,as well as electrical diagnosis and optical diagnosis,the uniformity control and discharge characteristics of the array type atmospheric cold plasma were studied.In the study of parallel double-tube arrays,we used argon and helium as the working gas for plasma generation.Plasma was developed by adjusting external parameters such as applied voltage amplitude,discharge drive frequency,and injected gas flow rate.The physical properties study found that these parameters influence the regularity of the jet characteristics of atmospheric pressure discharge plasma.The experimental diagnosis of the jet’s generation and evolution is conducted through the emission spectrum diagnostic method.In the study of linear(figure)arrays and honeycomb seven-tube arrays,we use helium as the main working gas for generating plasma,and adopt methods of adjusting different external parameters and emission spectrum analysis for discharge plasma jets.The generation and evolution of effective experimental diagnosis studies.