Nonlinear Vibration Control Of Nanobeam Based On Tunnel Field Effect Transistor Sensing

As an important component of Nano-Electro-Mechanical Systems(NEMS),nanobeam is often used to make high-precision sensors by researchers.However,as the size decreases further,nanobeam is prone to multi-value,bifurcation and other nonlinear phenomena in the vibration,which leads to the unstable vibration of the resonator and even the phenomenon of absorption,affecting its working stability.Therefore,eliminating nonlinear effect in vibration control is the primary consideration in the design process of nano-micro devices,and the nonlinear vibration control of nano-micro devices has become an important research direction of NEMS.In this paper,the nonlinear vibration control of nanobeam based on tunnel effect,field effect sensing and tunnel field effect sensing is studied.The factors affecting the nonlinear vibration control of nanobeam are analyzed by combining theoretical analysis with numerical simulation.Firstly,the nonlinear vibration control method of nanobeam based on electron tunneling effect is proposed with taking the Euler-Bornoulli cantilever beam as the vibration model.Tunneling currents are characterized by high sensitivity and high accuracy,and can be used to detect the vibration signals of nanobeam.Using displacement and velocity voltage feedback controllers and considering the effects of time delay feedback,the nonlinear vibration equation of nanobeam based on tunneling effect is obtained,and the amplitude-frequency response equation of primary resonance of nanobeam is obtained by the method of multiple scales.The relationship between parameters such as the direct-current and the alternating current excitation voltage,control gain and time delay and the vibration stability of nanobeam are discussed,and the factors that weaken the system nonlinearity and enhance the stability of the system are obtained.Secondly,the nonlinear vibration control of nanobeam based on field effect sensing is studied.The differential equation of nanobeam vibration with field effect sensing control is established.Considering the primary resonance and the third super-harmonic resonance,the factors affecting the nonlinear vibration control of nanobeam are studied.According to the analysis of amplitude-frequency curve,vibration control parameters,time-delay feedback parameters,damping value,initial distance between the nanobeam and the plate,gate voltage,source-drain voltage are all factors that affect the vibration amplitude and non-linearity of the nanobeam.In a certain range,the nonlinear term of vibration,the nonlinear term of time delay and the damping term of vibration can be adjusted by the change of vibration control parameters and feedback parameters with time delay.By selecting appropriate parameters,the vibration of the nanobeam can be kept in an equilibrium and stable state.Finally,considering the primary resonance and super harmonic resonance,the nonlinear vibration control of nanobeam based on tunnel field effect sensing is studied.The factors influencing the nonlinear vibration control of nanobeam are analyzed,and how to effectively control the nonlinearity by adjusting various factors.Research shows that vibration damping,vibration feedback control parameters,the distance between the nanobeam and the plate,the external initial voltage,the gate voltage and so on all have certain influence on the maximum amplitude and nonlinear vibration of the nanobeam.The research in this paper shows that tunnel effect,field effect sensing and tunnel field effect sensing of nanobeam has higher sensitivity and accuracy for vibration signal extraction,and have good control effect on the nonlinearity of nanobeam.In a certain range,The nonlinear vibration can be adjusted and controlled within a reasonable range by selecting system parameters,vibration control parameters and time-delay feedback parameters,appropriately.which can be achieved effective the nonlinear vibration control of nanobeam.