| The technology of microwave and radio frequency has been widely applied in the fields of communication,radar,remote sensing,guidance and radio astronomy.With the deep development of microwave and millimeter wave technology,the frequency of millimeter wave electronics is keeping going to higher.The chip size is requied to be smaller for the demonds of equipment miniaturization and low power consumption,while the complexity of integration is increasing.All these trends have placed new demands on measurement technology.The traditional measurement scheme called “black box” that based on the end-to-end principle can provide information about the device under test limitedly.So it is more important how to achieve non-intrusive detection of chips working at high-frequency with higher spatial resolutions.The distortion of numerical simulation software will be accumulated at high frequencies and high integration,resulting in serious deviations from the real data.While it can be achieved to characterize millimeter wave antennas,especially integrated millimeter wave transceiver antennas and high integrated millimeter wave in chip size,through non-intrusive local detection technology.Based on this,this work will study the non-invasive measurement technology of microwave and radio frenquency B-field based on quantum probe.As a lattice defect inherent in diamond,nitrogen(N)-Vacancy(V)color centers were developed by researchers to measure weak magnetic fields.In recent years,NV color center has been an international research hotspot in physics and engineering because of its controllable preparation,easy optical control and reading under ambient conditiont,stable optical properties and long coherence time at room temperature.Therefore,the characterization of magnetic fields with high spatial resolution and high sensitivity is of great significance for the diagnosis of traditional electromagnetic compatibility,the near-field characterization of antennas,and the realization of visual design and failure diagnosis of chips.It can even have far-reaching effects on modern medical imaging technology.Based on the electron or ion implantation technique and high temperature annealing process,this work prepares cube diamond single crystal or particle samples with high NV color center concentration based on high pressure high temprature diamond(HTHP)samples.We also prepared diamond-fiber samples with the size of diamond about 10 um to improve the fluorescence collection efficiency,which makes the spatial resolution is better than 1.25 m.The experiment system including laser excitation(532 nmin laser wavelength)and fluorescence collection system based on fiber-based NV color center is designed and set up in this work.The radio frequency(RF)planar spiral antenna and microwave coplanar waveguide circuit is fabricated as a device to be tested.The diamond sample is moved to the RF or microwave near field genenrated round the surface of the RF planar spiral antenna and microwave device trough a three-dimensional mobile platform.The response of fluorescence radiated by NV color center at different RF signal frequencies and amplitudes was also investigated in this work.On this basis,we also conduct preliminary imaging experiments on the monolithic microwave integrated circuit(MMIC).The experimental results preliminarily show the internal structure of the chip,and expose some design defects,which make up for the disadvantages of mainstream characterization methods in accuracy,spatial resolution and non-invasion. |