Detection And Research On Fast Electron Of DC Glow Discharge Based On Collision Electron Spectroscopy

Plasma scientific research and related applications are of great significance to basic science and industrial applications.Among them,atmospheric pressure plasma research is the main research of plasma applications.The electron energy distribution function evolved due to plasma diagnosis is applied to pure helium.Impurity gas analysis is at the forefront of diagnostic technology.Since the diagnostic theory is limited to low-pressure glow discharge plasmas,the electron energy distribution function experiments are limited to the low-pressure range.The diagnosis under high pressure only reaches 300 Torr,and the diagnosis of plasma electron energy distribution function under atmospheric pressure not only has an important breakthrough for plasma applications,but also helps to study the current atmospheric pressure jet plasma.In recent years,only a breakthrough has been made in the theory of high-pressure diagnosis,and no accurate atmospheric pressure electron energy distribution function has been obtained.The purpose of this article is to design a micro-hollow cathode DC discharge device,and diagnose the device after passing an appropriate amount of helium in an open environment,obtain the plasma parameters,and analyze the characteristic fast electrons displayed in the electron energy function.The research in this paper includes the following aspects:(1)Designing a similar device based on the current sandwich structure micro-discharge device to achieve a stable DC glow discharge in an open environment.(2)Plasma using a conventional probe diagnostic method for the device Volumetric diagnosis,electron density,ion density,electron temperature,electron energy distribution function and plasma potential were obtained.(3)Corresponding experimental diagnosis is performed on the device by using the highpressure diagnostic theory,and corrections are performed for related functions lacking in the theory.(4)Using the mainstream spectral broadening diagnostic method in atmospheric pressure diagnosis as a comparison,a comparative study of the plasma parameters of the device discharge parameters.(5)Investigate the characteristics of the electron energy distribution function under low pressure with the pressure change,verify the evolution of fast electrons in atmospheric pressure discharge,and explore the key physical and technical issues of plasma gas analysis.In this thesis,a stable DC jet micro-discharge plasma was obtained under atmospheric pressure,and traditional diagnostic parameters were obtained.The electron energy distribution function under high pressure was obtained using high pressure diagnostic theory,and the device was subjected to spectral diagnosis to obtain the density parameter.Finally,the evolution of fast electrons under low pressure was studied,and the evolution of fast electrons under high pressure was studied to further verify the smoothing effect of fast electrons under probe diagnosis.