Research On Preparation And Properties Of Metal-modified Carbon-based Nanocomposite Films

DLC film is an amorphous carbon film,which is mainly composed of diamond sp3 hybrid carbon and graphite phase sp2 hybrid carbon composition.Because of its excellent properties such as low friction coefficient,high wear resistance,good chemical inertness,excellent corrosion resistance and high optical transmittance,DLC films have been widely applied in mechanical,optical and aerospace fields in recent years.However,due to the extremely high internal stress,poor toughness and other defects,DLC films have been greatly limited in practical applications.Therefore,how to improve these defects of DLC film has always been a hot research topic.In recent years,researchers have found that many metal elements(such as Cr,Ti,W,Ag and Cu)can effectively improve the high residual stress,thermal stability and ductility of DLC films.In view of the above-mentioned defects of DLC thin film,In view of the defects of the above-mentioned DLC thin film,a double-excitation vacuum cathodic arc(pulsed cathodic arc and DC cathodic arc)evaporation technique is used in this paper,that is,the pulse cathodic arc generator is used to evaporate the graphite target and the magnetic separation DC cathode arc evaporate the metal target,to prepare Ti doping DLC,Cr doped DLC,(Ni,Cr)bimetallic co-doped DLC and the DLC film with Cr transition layer.The effects of the above experimental scheme on the composition,structure and properties of DLC films were investigated.The main research contents are as follows:(1)a-C:Ti films with different atomie percentages of Ti were prepared on n-type 100 silicon and 8K mirrored 304 stainless steel substrates.The composition,structure and surface morphology of the films were analyzed by Raman spectroscopy,XPS spectroscopy,AES,EDS and AFM.The mechanical properties and tribological properties of the films were tested by nanoindenter and Friction and wear tester.The wettability and corrosion resistance of the films were characterized and analyzed by using contact angle,surface tension measurement and electrochemical workstation.(2)a-C,a-C:Cr,Cr/a-C and Cr/a-C:Cr films were deposition on n-type 100 and 8K mirrored 304 stainless steel substrates.The structure of the film was analyzed by Raman spectroscopy.The elemental composition of the film was analyzed by XPS.The surface morphology of the film was observed by AFM and SEM.The mechanical properties and tribological properties of the films were tested by nanoindenter and Friction and wear tester.The wettability and corrosion resistance of the films were characterized and analyzed by using contact angle,surface tension measurement and electrochemical workstation.(3)a-C:(Ni,Cr)films with different atomic percentages of Ni and Cr were prepared on n-type 100 silicon and 8K mirrored 304 stainless steel substrate.The structure of the film was analyzed by Raman spectroscopy.The elemental composition of the film was analyzed by XPS.The surface morphology of the film was observed by AFM.The mechanical properties and tribological properties of the films were tested by nanoindenter and Friction and wear tester.The wettability and corrosion resistance of the films were characterized and analyzed by using contact angle,surface tension measurement and electrochemical workstation.