| The suction agent thin film material is one of the important materials for vacuum system and vacuum packaging device to obtain the vacuum degree.With the development of vacuum devices towards high integration and high performance,the traditional getter materials have the advantages of high activation temperature,poor inspiratory performance,small adsorption surface area,poor adhesion and poisonous vanadium,which cause damage to vacuum devices.Therefore,the development of green environmental protection,low activation temperature,better suction performance and longer service time of new Getter film materials become an urgent need to solve the engineering application of one of the problems.Zr-based materials have the advantages of green environmental protection,low activation temperature,wide suction and good suction performance,and are the focus of new material development of getter.In this paper,using the rare earth element Zr-Co-Y getter Alloy as the research object,the Zr-Co-Y film Getter is prepared by RF magnetron sputtering,the key technology and influencing factors of the film preparation are explored by the control variable method,and the three-dimensional growth mechanism of the film is revealed through the study of the crystal structure and microscopic morphology.The structure changes of getter films on different substrates were investigated,and coarse porous columnar Zr-Co-Y Getter films were prepared on rough monocrystalline silicon substrates.The suction rate and inspiratory capacity of the film were determined by dynamic constant pressure method.The results show that the porous columnar structure Zr-Co-Y Getter film can be prepared under RF magnetron sputtering power 80-100W,deposition pressure 3.0-4.0 Pa,and inlet flow rate under the condition of 40-70 sccm and grazing angle 70o.Sputtering high pressure and low pressure are not conducive to the preparation of the getter film,low pressure easy to generate dense structure,small specific surface area,high pressure film from layered to block growth,resulting in reduced adhesion,easy to fall off after activation.The Zr-Co-Y thin film is easier to grow in three-dimensional direction on the rough substrate,the grain size of the film is about 15nm,the interfacial and clearance between the tissues is obvious,and the diffusion channel of the active gas is increased,and the surface topography of the film is grape-like structure.The initial inspiratory rate is 40.5 cm-3·s-1·cm-2 when the initial inspiratory rate is 33.5cm-3·s-1·cm-2,45min activated under 300℃,25min conditions.The introduction of Ni coating reduces the degree of oxidation of the film,and the initial inspiratory rate increases obviously.Through the optimized design of the film layer,the film getter also exhibits a rough porous columnar structure on the polished crucible window,and the air-intake performance is better,and it can fully meet the industrial requirements.With the same growth process parameters,the porous substrate is easier to obtain porous columnar structure than the smooth substrate,and the film suction rate is faster.When Zr-Co-Y thin film was activated at 300°C for 45min,the grain size was significantly increased and the grain boundary became wider.The initial inhalation rate reached67.5cm3·s-1·cm-2.With the increase of activation temperature and the prolongation of the activation time,segregation of Co occurs in the Zr-Co-Y thin film.After inhalation,the film mainly exists in the form of zirconium oxide and CoOH.This dissertation provides a reference for the structural design and preparation process of non-evaporable getter films.The successful development of this process will effectively solve the disadvantages of easy get-off of getters,complicated process,and high cost.It is very good with uncooled coke.Compatible with the planar technology,it plays a very good role in promoting the industrialization of ceramic packages and wafer-level packaging of uncooled focal plane detectors,greatly reducing packaging costs and improving stability. |
PDF Full Text Request