Resarch On Microstructure,Mechanical And Tribological Properties Of TiN Based Nanocomposite Films

In this paper,a series of TiMgN,TiBN and TiMoBN composite films were prepared by magnetron sputtering.X-ray diffraction(XRD),field emission scanning electron microscopy(SEM),Fourier transform spectrometry,nanoindentation,UMT-2 tribometer,and three-dimensional profiler were used to investigate the microstructure,mechanical properties,and friction and wear properties of composite films.The microstructure,mechanical properties and friction and wear properties of the composite membrane were studied.The results of the study are as follows.The results of the TiMgN composite film show that the TiMgN composite film is composed of c-TiN phase with(111)preferred orientation.The Mg element is added to TiN,and the(Ti,Mg)N substituted solid solution formed by displacing Ti atoms with Mg atoms exists.With the increase of Mg content,the film hardness,anti-elastic deformation and deformation resistance increase first and then decrease.The Mg element can greatly improve the film-based bonding force of the film.The addition of a proper amount of Mg element can improve the room temperature tribological properties of the film.When the Mg content is constant,the friction coefficient first decreases and then rises with the increase of ambient temperature,but the trend of wear rate changes is the opposite.The results of TiBN composite films show that the composition phase of TiBN composite film is TiN with face-centered cubic structure,and the preferred orientation is(111).B will be dissolved in TiN lattice when content is less,and form Ti(B,N)replacement solid solution.When B content is high,B precipitates to form amorphous BN.With the increase of B content,the hardness and elastic modulus of TiBN composite film first increased and then decreased.The B element can increase the binding force of the film based on the film.The friction coefficient of TiBN with a B content of 10.34at% is the lowest.The wear rate increases with the increase of B content.The friction and wear properties of TiBN film with B content of 10.34at% at room temperature,300 C and 700 C were tested respectively.The friction coefficient was the highest at 300 C,and the friction coefficient at 700 C was the lowest.The wear rate increases with the increase of temperature and then decrease.The results of TiMoBN composite films showed that after adding Mo,the crystal structure of the films did not change,which was the face centered cubic TiN structure.Preferred orientation is(111).B exists in amorphous form.After the addition of Mo,Mo exists in the form of(Ti,Mo)N replacement solid solution.With the increase of Mo content,the hardness and elastic modulus of the composite films first increase and then decrease.The friction coefficient and wear rate of TiMoBN composite membrane are lower than those of TiBN composite film at room temperature.The friction coefficient of the composite membrane with a certain content of Mo was tested at ambient temperature,300 and 600 degrees centigrade respectively.It was found that the friction coefficient of the composite film was the lowest at 600 C and the highest at 300.Wear rate of composite films at 600 °C is higher than at 300 °.