Silicon Carbide's Suspension And Re-dispersion Reseach For Grinding Silicon Wafer

This experiment studied the grinding fluid formula,explored the performance of the slurry when one dispersing agent was mixed with a variety of surfactants,The surfactants used in this study including: tween(20,40,60,80,85),Sodium stearate,Triton X-100,Tetramethylammonium hydroxide,sodium dodecyl sulfate,sodium dodecylbenzenesulfonate,triethanolamine,Peregal,Turkey red oil,carboxymethyl cellulose,lauryl dimethyl betaine,Dodecyl trimethyl ammonium bromide,cetyl trimethyl ammonium bromide,dodecyl trimethyl ammonium chloride.The experiment used technical grade silicon carbide for grinding material.In this paper,the performance test of a variety of SiC grinding fluid is carried out including the settlement test,zeta potential test,viscosity test and surface tension test to investigate the effect of the type and amount of surfactants on the properties of the grinding fluid.According to four kinds of performance test,the optimum dosage of surfactants was determined.At the same time,in the process of screening the surfactants,four kinds of surfactants which can make high solid content slurry suspended stably with a low addition of it was found.Also,six kinds of surfactants which can make the slurry not harden after the settlement(re-dispersion)and the mechanism is explained.Now the main development direction of grinding fluid is to improve the SiC suspension character,but for the SiC re-dispersion research development of larger particle size(>1?m)was very limited,this experiment not only committed to improving the suspension performance of SiC but also successfully prepared various kinds of re-dispersion grinding fluid.