Design,Preparation And Cutting Performance Of Textured Tools Fabricated By Inductively Coupled Plasma Etching In Dry Cutting

Based on the manufacture defects such as uncontrollable texture size,process ablation,low process precision and low process efficiency in the traditional process of fabricating texture on the surface of cutting tools,the idea and method of applying Plasma etching technology to the textured tool fabrication are proposed.Through the design theory of micro-textured cutting tools and the technology research of texture fabrication by Plasma etching,we develop the preparation method of Plasma-textured cutting tools and systematically investigate the machinability of those Plasma-textured cutting tools by machining medium carbon steels in dry cutting experiments.According to machinability requirements of textured tools,design method of orthogonal test and finite element simulation technology are performed to investigate the effect of five texture parameters(texture width,texture gap,texture depth,texture distance with cutting edge and texture angle with cutting edge)on textured tool's machinability.By analyzing the trend chart of five texture parameters concluded from finite element simulation experiments,theoretical optimum texture parameters are achieved,and it is also found that texture angle with cutting edge is the most effective factor to textured tool's machinability in five texture parameters.Furthermore,based on the achieving theoretical optimum texture parameters,secondary optimization of texture angle with cutting edge is establish,and then the actual optimum texture parameters are obtained:texture width is 50?m,texture gap is 90?m,texture depth is 8?m,texture distance with cutting edge is 90?m and texture angle with cutting edge is 80°.The processing method of fabricating Plasma-textured cutting tools is designed and investigated.Different processing parameters of cutting tools' pretreatment process,photolithographic process,thin-film process and Plasma etching process are analyzed to investigate their effect on texture forming.Moreover,inductively coupled Plasma etching process also be studied and optimized,then,the optimum Plasma etching process parameters are obtained:SF6/O2/Ar gas flow ratio is 20/60/10sccm,ICP power is 800W,RF power is 250W,gas pressure is 3Pa,substrate temperature is 60[.Finally,Plasma-textured cutting tools are successfully prepared by inductively coupled Plasma etching technology.Traditional non-textured cutting tools and Plasma-textured cutting tools(Tool TT-P and Tool TT-I)that we design and fabricate are used in dry cutting comparison experiments with workpieces material of AISI 1045 steels.The experiment results show:Plasma-textured cutting tools fabricated by inductively coupled Plasma etching technology can effectively reduce the vibration of three direction cutting forces and make cutting process much more stable.What's more,Plasma-textured cutting tool of Tool TT-I exhibits most significant machinability among three kinds of cutting tools and the effect of it that can reduce cutting forces becomes much more obvious under the high cutting speed conditions.However,under low cutting speed conditions,both two types of Plasma-textured cutting tools(Tool TT-P and Tool TT-I)experience structural destruction of textures and nearly loss the effect of friction reduction.