The Deposition And Thermal Shock Resistance Of The Anti-oxidation Coating Of W-Re Alloy Wire

Temperature sensor has been widely used in modern measurement technology..The thermocouple,especially tungsten-rhenium thermocouple plays a very important role in high temperature measurement.However,thermocouple material is very easy to oxidation at high temperature and loss of temperature performance,so the preparation of suitable antioxidant coating has become a key technology to further improve the performance and use of thermocouple.Therefore,access to cheap tungsten rhenium thermocouple oxidation technology,which can effectively work under high oxygen environment is the pursuit of the goal.Firstly,the structure,principle and application of arc ion plating equipment and electron beam evaporation equipment are introduced in this paper.The oxidation process of tungsten rhenium wire surface skin,namely NaOH aqueous bath method.In this paper,the principles of experimental drugs and materials,SEM and other equipment are introduced.Secondly,according to the mechanism of function gradient thin film,and the water absorption sponge theory,designed with ZrN as transition layer,ZrO films and anti-oxidation layer.Arc ion plating and electron beam evaporation are selected as an anti-oxidation coating deposition method.Again,the process parameters of the deposited films were selected.Through a lot of experiments,the vacuum chamber preheating temperature,gas flow ratio,substrate negative bias voltage,arc current and other process parameters were selected to determine the deposition of ZrN,ZrO2 thin film process parameters,In the end,the thermal shock resistance of the anti-oxidation coating was studied.By comparing the different films in the same conditions,after the same number of thermal shock test,the anti-oxidation coating off the case,to determine the thermal shock resistance of the coating.Through the thermocouple temperature measurement experiment,analysis of the causes of the error of temperature measurement.In short,with ZrN as the transition layer,ZrO2 as functional thin film anti oxidation layer anti oxidation performance of the best,for the further development of anti-oxidation technology of tungsten rhenium thermocouple,provides the basis for.