Fabrication And Properties Of The Zirconia Thin Films

Zirconium oxide?ZrO₂?,as a multifunctional compound,is widely used in sensors,fuel cells,refractories,catalysts,catalyst supports,solid electrolytes,and biomedical materials,due to its high chemical stability,high dielectric constant,low electrical conductivity,and good biocompatibility.Compared with the dense zirconia thin film,the ordered porous nanostructured zirconia thin film has a large specific surface area,The existence of these intrinsic defects would greatly affect the properties of the zirconia film,making it appeared some novel physical properties.To the end,an orderly porous nanostructured zirconia thin film was prepared by anodization method,and X-ray diffraction?XRD?,MPMS magnetic measurement system,field emission scanning electron microscope?SEM?,and ultraviolet spectrophotometer were respectively used.UV-vis and fluorescence spectrophotometer?PL?were used to characterize and study the relationship between structural parameters and structural color at room temperature magnetic properties,IV properties and growth conditions.?1?A series of ultra-thin ZrO₂ films were prepared by a single anodic oxidation method in ethylene glycol electrolyte containing NH₄F and deionized water at room temperature environment.The film was found to exhibit high saturation color in the visible range.The adjustment of the film color can be achieved by controlling the anodization time.When the anodic oxidation time of the prepared ZrO₂ film was more than 30s?thickness exceeds108nm?,the film was a discontinuous film.The ultraviolet spectrophotometer test showed that the film had obvious reflection peak,and the Bragg?s formula was satisfied between the corresponding wavelength and the film thickness.When the ZrO₂ film was prepared for less than 30s?thickness less than 108 nm?,the UV-vis showed that the film no longer showed a reflection peak,but a distinct absorption peak appeared.The color of the film was consistent with the complementary color of the absorption peak.It proved that the structural color of the film satisfied with the complementary mechanism.?2?A series of ordered porous nanostructured ZrO₂ films were prepared by one-step anodization at room temperature.The effects of deionized water content,anodizing voltage and electrolyte type on the morphology of ordered porous nanostructured ZrO₂ films was investigated in detail.We discussed the effects of deionized water content,anodization voltage and electrolyte type to morphology of ZrO₂ nanotubes.Through the characterization of the sample,it can conclude that as the water content in the electrolyte increases,the diameter of the nanotubes increases gradually.The diameter of the nanotubes also increasing with increasing anodization voltage,and the wall thickness was unchanged.Compared to the inorganic electrolyte,the nanotubes obtained by anodizing in the organic electrolyte?glycerol?was uniform and order.?3?It found that the porous nanostructured ZrO₂ film had obvious room temperature ferromagnetism by magnetic testing of MPMS,and its magnetic properties was related to the structural parameters of the film and the annealing environment.It found that as the pore diameter increase,the magnetic properties increase gradually,and the oxygen content decrease in the annealing environment.The influence of the impurity elements of the sample excluded from the range of XRD and EDS.The PL spectrum test proved that the room temperature ferromagnetism was related to the oxygen vacancy.?4?An Ag/ZrO₂/Zr resistance switch device was prepared.The I-V test showed that the porous nanostructured ZrO₂ film had obvious bipolar resistive switching properties.The relationship between resistive switching properties and room temperature magnetism was studied.Under the control of electric field,the magnetic changes as the occurrence of resistive change.This phenomenon would expected to realize the concept of multi-function memory.