A Study On Preparation And Properties Of Graphene Thin Films By RF-PECVD Method

Graphene is a single layer of graphite only one atom thick,with a hexagonal honeycomb lattice structure.Due to its unique microstructure,it has excellent physical and chemical properties.Graphene has excellent thermal and chemical stability and low interlamellar shear force.Therefore,graphene has great potential in corrosion resistance,anti-friction and anti-friction.Due to its excellent properties and broad application prospect,there is great interest in the preparation of high-quality,large-area and long-term ordered graphene films.Graphene thin films were prepared by RF plasma enhanced chemical vapor deposition(rf-pecvd)at low growth temperature.This article explores the growth of the different gas flow ratio,temperature,reaction pressure,deposition time,etc.The influence of experimental parameters on the thin film growth,using SEM,EDS,TEM,AFM,XRD and Raman spectroscopic characterization methods such as the extent of lattice defects of thin film samples,characterizing the surface morphology,film layer analysis,obtained the optimum technological parameters of the preparation of graphene films,basement under the condition of the process parameters for copper foil successful preparation of the graphene films.The effects of different process parameters on the film's corrosion resistance,friction resistance,elastic modulus and hardness were studied.The research results show that:(1)By PECVD400 type plasma enhanced chemical vapor deposition system growth film,the experimental results show that the growth temperature 700 ?,reaction pressure 600 pa,CH4,H2 = 40 min 15:20,growth time,rf power 200 w process under the condition of the preparation of the multilayer graphene films.(2)The AUTOLAB electrochemical testing system was used to study the corrosion resistance of samples with different growth temperatures through polarization curves,and the samples were compared with pure copper samples.Results show that with the increase of growth temperature,the corrosion current density showed a trend of decrease,the corrosion potential rise,in the growth temperature 700 ? maximum corrosion and the corrosion potential of 0.1 V,is pure copper sample increased about 0.3 V,the corrosion current density significantly lower than pure copper.(3)Using the salt spray test studied the preparation of thin films by the corrosion resistance and morphology were characterized by SEM and EDS of corrosion and corrosion products were analyzed,and the research results show that with the increase of growth temperature,the corrosion effect of the graphene films,the better,get the best results when growth temperature 700 ?,explanation by radio frequency plasma enhanced chemical vapor deposition system was prepared by the graphene films effectively enhance the corrosion resistance of the sample.(4)The MS-T3000 friction and wear tester on friction properties of the preparation of thin film was studied,through poor analysis research growth temperature,gas flow ratio,reaction pressure,the influence of the growth time of the friction coefficient,the results show that the primary and secondary factors are: Growth temperature > growth time > reaction pressure > gas flow ratio.It was found by nano-indentation test that the elastic modulus and hardness of the film decreased with the increase of temperature.