Two-dimensional?2D?semiconductors are expected to be used in next-generation electronic devices due to their unique structure and excellent physical properties.The controllable preparation of the large-scale and high-quality 2D semiconductors is still one of the research hotspots.In this paper,single-layer MoS2,MoSe2 and SnS2/MoSe2 van der Waals heterojunctions were synthesized by chemical vapor deposition?CVD?.Their electron transport and optoelectronic properties were studied.Firstly,the water-assisted CVD method has been developed to grow high-quality single-layer MoS2 with clean surface,uniform distribution and large scale.Field effect transistors?FETs?were fabricated and their optoelectronic properties were measured.The results show that the water-assisted grown MoS2 FET has large drive current and high mobility(25 cm2 V-1 s-1),as well as a high ON/OFF current ratio?108?.In addition,the transistor exhibits good photoresponse properties to 532 nm laser.Secondly,single layer MoSe2 and atomically thin SnS2 films were synthesized by CVD method.The synthesized single-layer MoSe2 has a large area,uniform dispersion and high crystal quality.The MoSe2-based FET exhibits excellent electron transport performance.Continuous SnS2films with multilayer domains on top surface were obtained,and their electronic and optoelectronic properties were investigated.The SnS2-based FETs show ON/OFF current ratio of 102 and good photoresponse properties.Finally,SnS2/MoSe2 van der Waals heterojunctions was prepared by a two-step CVD method.The morphological,structural characterization and optoelectronic properties of the as-synthesized heterojunctions were investigated.The results indicate that the heterojunctions are clean and uniform,and have high crystal quality.Besides,the heterojunctions exhibit bipolar behavior. |