Preparation Of Composite Microstructure Surface And Its Optical Properties

There is a strong correlation between the performance of an object or material and its size.The various physical,chemical properties,and macroscopic objects of micro-nanostructures,materials,and devices exhibit huge differences.If you want to use micro-nanostructures,materials,and devices to achieve new effects and technology applications,you must strictly control the accuracy of material growth and processing.At the same time,in the search for the variation law of micro-nano-scale material properties,the function of the device and the possible application problems,the corresponding micro-nano processing technology is indispensable.In this paper,we introduce the common techniques used in micro-nano manufacturing,the process characteristics of various technologies,the feature sizes of processing and common structures.Discussed their processing characteristics and common applications,future development and application prospects.Among many micro-nano processing technologies,lithography has become one of the common methods for fabricating micro-nano structures and devices.Among them,the ultraviolet lithography processing technology is widely used in industrial production due to its low production cost and mature process.In UV lithography,the relatively complete production of pre-designed graphics structures is at the heart of this technology.Among the numerous process steps,the photoresist coating process and the development process have a great impact on production.In the article,we discuss the effect of a photoresist homogenization process on the production of gratings in UV lithography experiments.By optimizing the process parameters,the experimental parameters of the photoresist are relatively stable and excellent.The photoresist has certain guiding significance in experiments and production.In addition,we have completely introduced the experimental process and experimental process for producing a waveguide grating in the article.The optical transmission characteristics gratings and waveguide gratings with micro-nano scale have attracted people's long-term attention,which as a basic research problem in the field of photo-physics.Devices and systems constructed with gratings and waveguide gratings have implemented many special functions such as filters,communications,resonant cavities,super-resolution,detection,sensing,and so on.Obviously,there are still many problems worthy of further exploration for the research and application of gratings and waveguide gratings on the micro-nano scale.In this paper,we use the Guided Mode Resonance(GMR)effect in a special grating structure,Compound Waveguide Grating(CWG)structure,and use this effect for the realization of biosensing.Adjusting of the quality factor of the biosensor can be achieved by changing the fill factor of the compound waveguide grating structure.In order to further enhance the biosensor's sensitivity of the structure,we propose a wave vector modulation method.The results show that the method is of great help to the improvement of sensitivity.At the same time,we also discuss the effect of grating constants on sensitivity.Combined with the characteristics of the mid-infrared light band,the absorption band of most biological solutions is in the mid-infrared band.With the help of the micro-nano processing conditions of the laboratory,we experimentally applied the composite waveguide grating to the mid-infrared band biosensing and completed the test.From anti-outline sunglasses to mobile phone foils,from transparent conductive films to flexible wearable electronic products,optical films with special functions as another micro-nano material play an increasingly important role in scientific research and human daily life.Among them,how to improve the multi-angle scattering efficiency of thin films has always been a topic of concern for researchers.In this paper,we prepared a titanium dioxide reflective coating composed of four different microstructures,and experimentally characterized the diffuse reflection efficiency of the four coatings.The results show that the microstructure has a great influence on the diffuse reflection efficiency of the coating.The diffuse reflection efficiency of the multi-mesoporous structure titanium dioxide nanosphere coating is improved compared with the other three structures of titanium dioxide coating.The experimental results have certain guiding significance for the design of the subsequent diffuse reflection device.In order to analyze the reasons for their differentiation,we use the theoretical method theory of finite time domain difference to analyze the physical scattering mechanism of different structures and explain the reasons for the differences.At the same time,we also experimentally characterize the reflection efficiency of incident light multi-mesoporous titanium dioxide nanosphere reflective coatings with different polarizations and angles.This paper mainly focuses on the following aspects.According to the theoretical basis of the Guide Mode Resonance of the Compound Waveguide Grating,the application prospect of the biosensor is explored,and the device is expected to have better expressiveness in sensing sensitivity.A series of micro-nano processing is adopted,at the same time,experimental preparation of the waveguide grating structure is used as an implementation of biosensing.Different micro-nano-structured films of titanium dioxide exhibit different multi-angle scattering efficiencies,which provide a new idea and basis for designing thin-film devices with ultra-high diffuse reflection efficiency.We designed and prepared titanium dioxide micro-mesoporous sphere structure films as a diffuse reflection device and explore its potential application value.The first chapter of this paper will introduce the characteristics of existing micro-nano processing technology and its application in nanomaterials and device research.In the second chapter,we theoretically study how to effectively control the Guide Mode Resonance of the Compound Waveguide Grating structure.Based on the research results,we verify its feasibility in improving the sensitivity of biosensor.In the third chapter,we focus on the micro-nano processing method and processing technology of micro-nano waveguide grating structure,and finally verify its sensing function.It will focus on UV lithography and ion beam etching.In the fourth chapter of the paper,we will introduce the diffuse reflectance and microstructure characteristics of a titanium dioxide nanocomposite coating and explore its application prospects.