Preparation Of YSZ Thin Film And Investigation Of Its Infrared Radiation Characteristics

With the rapid development of science and technology,aviation technology has become a key development field.Aviation and defence are already closely linked.At present,the rapid increase of flight speed leads to the rapid increase of temperature in different parts of the engine body.Traditional thermal protection and low detectability materials have been increasingly restricted.Therefore,it is urgent to develop a new material that can be used at high temperature.The material system of YSZ has a good application in thermal protection and stealth coating materials due to its excellent high temperature conductivity and low thermal conductivity,and it is expected to realize the multifunctional coating system based on YSZ.When the thickness of YSZ coating material reaches 1mm,its transmittance in the radar band is only 25%,but when the thickness is less than 4um,its transmittance is infinitely close to 100%.In order to make use of its high permeability and achieve multispectral stealth compatibility of radar band,the infrared band characteristics of YSZ thin film material were studied.So In this paper,YSZ film samples were prepared by experimental methods to explore the influence of different process points on the infrared performance of the film samples,and the changes in the infrared performance were explored through subsequent heat treatment and composite deposition.The main work contents are as follows:Firstly,in this paper,by means of magnetron sputtering,from the preparation process of sputtering power,pressure and temperature to analysis the structure,electrical properties,infrared radiation characteristics of YSZ thin film.Draw conclusions from tests,and set 200w,0.5Pa,room temperature as the best process point.Secondly,in this paper,the influence of temperature on the properties of YSZ thin film samples deposited at the best preparation process point was investigated by changing the heat treatment temperature and time.It was found that the reflectance of YSZ thin film samples increased with the increase of temperature compared with normal temperature,and the reflectance decreased with the increase of heat treatment time.Lastly,In this paper,the preparation process of ZrB₂ thin film sample was briefly investigated,and then the YSZ-ZrB₂ composite film was prepared by composite deposition.By changing the thickness of the topmost YSZ film sample,it was found that the infrared reflectance of the composite film changed greatly with the change of thickness.The composite film with a top layer thickness of 300nm was selected for heat treatment,and it was found that compared with YSZ single-layer film,the oxidation resistance of the composite film was weakened,while that of ZrB2 single-layer film was enhanced.