Study On Non-contact Clamping Technology Based On Near-field Acoustic Levitation

Non-contact technology has important application value in the fields of biology,chemistry,space materials science,gas anti-friction lubrication,MEMS and other fields.In the field of ultra-precision manufacturing,such as the fabrication and transportation of wafer and silicon,it needs to be carried out under non-contact and ultra-purification conditions.Contact clamping and transportation has not been able to meet the development needs of today's ultra-precision manufacturing.Non-contact clamping and transportation technology comes into being.In this paper,the ultrasonic suspension clamping technology is taken as the research object.It mainly studies how to design the ultrasonic suspension non-contact fixture structure,how to establish the fixture structure parameter design model,and how to improve the stability of the non-contact clamping.The main research contents are as follows:1.In order to improve the clamping stability of the non-contact fixture,the shortcomings of the ultrasonic suspension fixture without lateral constraining force are analyzed,and a new type of ultrasonic suspension fixture with lateral constraining force is designed.It is proposed to use the transverse ultrasonic vibration of side plates on the radiant end to excite the acoustic radiation pressure,thereby providing lateral constraining force to the workpiece.2.Training sample points and test sample points are generated using the Optimized Latin Hypercube Sampling method.Based on three common surrogate model technologies(KRG,PRS,SVR),a new ultrasonic suspension fixture design model was established,and the model accuracy was tested with test sample points.The genetic algorithm was used to optimize the structural parameters of the new ultrasonic suspension fixture.3.In order to verify the non-contact clamping effect of the new ultrasonic suspension fixture,the experimental platform was built by using industrial vision measurement technology.The camera imaging model and distortion error were analyzed.The image smoothing technique and edge detection algorithm in image processing were studied.Combined with the actual situation,median filtering is used for smoothing and noise reduction.The marker points are detected based on the Hough transform principle and the Canny edge detection algorithm.4.The results of the clamping comparison test show that the motion displacement range of the workpiece in the new ultrasonic suspension fixture designed in this paper is reduced by about 95%,the speed is also reduced by about 90%,the constraining force is 4.40±0.17 mN.The workpiece is constrained more stably in the new ultrasonic suspension fixture,which verifies the rationality and validity of the design of the ultrasonic suspension fixture with lateral constraining force.