The Synthesis And Property Characterization Of The Strong Correlated SrMoO₃ Conductive Material

There has been a surge of interest in the advance electronic devices with the progress of society and technology.In recent years,the strong correlated system material with high conductivity,thermal stability and lattice matched with other thin films has attracted growing attention by researchers.Besides,In order to meet the requirement of high quality thin films deposition in above mentioned application,the bulk SrMoO₃ ceramic target should be higher density,lower resistivity and purer perovskite phase.In this thesis,we have systematically investigated the synthetic of high sintering activity SrMoO₃ precursor powders,the preparation of higher density,lower resistivity and purer perovskite phase SrMoO₃ ceramic targets and the deposition and characterization of SrMoO₃ thin films.The main conclusions and contents are as follows:1.The SrMoO₄ powders were prepared by solid-state reaction and ball milling respectively.The effect of preparation methods and ball milling times on the properties of the powders were investigated.And then,The impacts of the SrMoO₄powder properties and reduction conditions on the properties of SrMoO₃ powders were discussed.The results show that:SrMoO₄ powders obtained by ball milling method had better particle size distribution;the SrMoO₃ powder reducted at 1160?for 10 h showed the smallest crystallite grain size of 41 nm and the lowest resistivity of 1.1?·cm,which is suitable for the preparation of ceramic target.2.A convenient,low-cost and high efficiency method for preparing pure perovskite phase,highly coductive and dense SrMoO₃ ceramics was developed by pressureless sintering finer SrMoO₃ precursor particles in N₂ atmosphere.And the effect of sintering temperatures on the crystallite phase,resistivity and density were studied.The results show that:all SrMoO₃ ceramic samples sintered by this method were pure perovskite phase,the ceramic with the lowest resitivity of 5.4×10^-5?·cm and the highest density of 92.2%can be obtained by sintering at 1460?for 4 h.3.We prepared the SMO films by magnetron sputtering and pulsed laser deposition?PLD?with the SrMoO₃ ceramic target obtained above.The effect of different deposition atmosphere,substrate types and pulse laser energy on the film properties were discussed.The results show that:Firstly,the number of the Mo atomic was great than the Sr atomic in SMO films which deposited by magnetron sputtering,and the Mo elements all existed in the Mo⁴⁺cation state,which is the same as that in the ceramic target.Moreover,the SrMoO₃ film prepared by PLD exhibits excellent characteristics,when the pulse laser energy was 200mJ,the film showed the lowest resistivity of 8.1×10^-5?·cm and roughness of 5.6 nm.Finally,the optical properties of all films samples were low transmittance,high reflectance and high absorptance.In this thesis,the synthetic of high sintering activity SrMoO₃ precursor powders,the preparation of higher density,lower resistivity and purer perovskite phase SrMoO₃ceramic targets and the deposition and characterization of SrMoO₃ thin films were systematically investigated.The research results obtained in this thesis have some guiding significance for the preparation and characterzation of the SrMoO₃ films.