Particle Size And Morphology Controlled Synthesis Of Ceria And Their Polishing Properties

In this paper,cerium oxides with different particle sizes and morphologies were synthesized by different methods,and their material removal rate(MRR)and surface roughness of polished K9 glass were evaluated.The relationship between the size of cerium oxide,zeta potential,chemical activity and polishing performance was investigated.Basic cerium carbonate with large specific gravity was used as a precursor,and a cerium oxide polishing powders were prepared by stirring ball milling and calcining.The effects of factors such as ball milling time,ball-to-material ratio,and liquid-solid ratio on the particle size and distribution of the ball-milled product were studied using orthogonal experiments.The order of factors affecting the particle size of the product was determined to be ball-to-material ratio>ball milling time>liquid-solid Ratio,the best ball milling conditions are a liquid-solid ratio of 1:1,a ball-to-material ratio of 7.5:1,and a ball milling time of 5h.The cerium oxide was prepared by calcining the ball mill products obtained under the optimal conditions at different temperatures,and the relationship between their polishing properties and their morphology,particle size and distribution as well as zeta potential was evaluated.The results show that,as the calcination temperature increased to 800? to 1100?,the resultant cerium oxide on K9 glass polishing material removal rate(the MRR)first increases,then decreases.It is the largest at 900?,up to 342.31 nm/min,and the root-mean-square(RMS)roughness of the polished surface is 0.286 nm.The cerium oxide particles are spherical,and the average particle size of the primary particles observed by SEM is 114 nm.Using the method described above,the effect of the amount of boric acid added on the morphology and phase of the basic cerium carbonate particles before and after ball milling was studied,and it was proved that when the amount of boric acid was 3%,the particle size and distribution of the ball milled product were small.The ball mill product is calcined at different temperatures to obtain cerium oxide which can be used for polishing.The relationship between morphology and particle size distribution,Zeta potential and polishing performance of cerium oxide at different calcination temperatures was determined.It was proved that the cerium oxide synthesized by calcining at 1000? for 3 h had the best polishing performance,and the MRR reached 245.22 nm/min.The SEM observation observed that the obtained primary particles had an average particle diameter of about 1.38 ?m,and were spherical particles.After polishing,the RMS roughness of the K9 glass surface was 1.260 nm.The self-assembled octahedral cerium oxide with excellent morphology and uniform particle size was prepared by hydrothermal method..The results show that the prepared self-assembled octahedral cerium oxide has good dispersibility,uniform particle size,and the octahedral side length is about 59.64 nm.The morphology of the self-assembled octahedral cerium oxide sample calcined in the temperature range of 400?-800? is basically Remaining unchanged,CO catalytic oxidation,H2-TPR,and MRR decrease with increasing temperature.At 400?,the CO catalytic oxidation,H2-TPR,and MRR of cerium oxide are the best.The MRR is 194.86 nm/min.The stronger the CO catalytic activity,the larger the oxygen peak area on the surface of cerium oxide,and the greater the material removal rate.After polishing,the RMS roughness of the K9 glass surface was 0.251 nm.