Fabrication And Application Of Flexible Pressure Sensor Based On Micro Nano Structure

With the development of electronic technology,intelligent wearable devices,bionic electronic skin and other fields are gradually developed by researchers,making its high-sensitivity sensor become a hot research in recent years.However,the appearance of flexible sensors has overturned people's cognition of traditional sensors.Flexible pressure sensor can act on curved surface and even uneven surface,which has been highly concerned by scholars in the field of flexible sensor at domestic and abroad.At present,there are still some problems in the high-sensitivity sensor,such as electrode fracture due to the deformation of the sensor structure;poor adhesion between the metal layer and the flexible substrate after repeated use;high manufacturing cost,which limits the batch manufacturing.Therefore,this paper focuses on the above problems of flexible pressure sensor.It includes the fabrication of micro structure flexible dielectric layer with improved sensitivity,the fabrication of electrode plate modified by organosilicon compound and the final performance test of flexible sensing structure.?1?A pressure sensing structure based on PDMS?polydimethylsiloxane?flexible material is designed,which is composed of upper and lower parallel flexible electrode plates and middle flexible dielectric layer.Through the chemical etching process,the middle dielectric layer is microstructured,and the double-sided microstructural dielectric layer is prepared to improve the sensitivity,reduce response time and low detection limit.?2?The effect of the surface modification process on the adhesion characteristics of organosilicon substrate and metal film was explored to improve the adhesion between organosilicon substrate and metal material.The tensile conductivity of the prepared flexible electrode is up to 150%,and 400 times of repeated stretching recovery stretching experiments have been carried out on the flexible electrode plate.The change of the resistance value of the flexible electrode plate is only 0.8?,which proves that the prepared flexible electrode has good repeatability.?3?The flexible dielectric layer based on PDMS was fabricated and packaged,and its sensitivity and reliability were tested.The flexible pressure sensor can fit on the curved surface of skin,mouse and so on.The results show that there are two linear regions in the pressure range of 0?10 k Pa,with the highest sensitivity of 0.56 k Pa^-1.After 400 bending operations,the performance of the sensor almost remains unchanged,and there is no significant performance degradation or serious deviation in the response curve.The microstructural sensor made of PDMS organosilicon compound can take into account the advantages of high sensitivity and low detection,and has good performance and stability.Based on this excellent performance,the feasibility of the sensor structure in wearable equipment,bionic electronic skin and other fields is explored.It provides a new idea for the structural design of high sensitivity flexible sensor.