Research On Electrochemical Micromachining Technology Based On Sinusoidal Signal

Electrochemical micromachining is a kind of machining process in which the metal workpiece is anodic dissolved in the electrolyte,during the processing,the anode metal material is removed in the form of ions,without cutting force and surface internal stress,so this makes the surface quality of the workpiece processed good and the machining accuracy high.It has a very broad development prospect in the processing of difficult materials and complex shape parts,and it is of great significance in the field of micro and nano fabrication manufacturing.An electrochemical micromachining technology based on sinusoidal signal is proposed.The traditional pulse signal is replaced by sinusoidal signal,the mathematical model of the machining system is established,the machining mechanism of this method is analyzed,and the micro electrochemical machining experiments of micropore and two-dimensional microstructure are carried out by using this technology.The machining accuracy is up to 1 ?m,which proves the feasibility of this method and analyzes the process parameters affecting the ECM accuracy.The electrochemical micromachining technology based on the combined effect of sinusoidal signal and variable resistance is studied.The variable resistance is introduced into the machining circuit,and the mathematical model of the machining system is established.The variation law of the machining accuracy with the sine signal frequency and the variable resistance value is analyzed.The machining voltage and time constant in the machining circuit are changed,so that the electrochemical machining state is in the temporary machining state.The machining accuracy is improved to 450 nm by micro electrochemical machining experiment,which verifies the feasibility of this method to obtain high machining accuracy.Electrochemical micromachining technology based on variable resistance and composite signal is studied.The mathematical model of this kind of machining system is established,and the variation rule of machining accuracy with the frequency of sine signal and the frequency multiplication coefficient is analyzed.The results show that the composite signal can prolong the time to reach the decomposition voltage,shorten the machining time,and achieve higher precision electrochemical machining in the same cycle.The production of positive phase adder is completed.Two sinusoidal signals are converted into one compound sinusoidal signal,and electrochemical machining of micropore and two-dimensional microstructure is carried out with optimized process parameters.The machining accuracy reaches 100 nm,which proves that the machining method has obvious advantages.