Research On Novel Micro-nano Structure And Processing Methods Based On Wrinkle

Over the past several decades,the manufacture of advanced electronic materials and structures has made great progress.The development of electronic devices and electronic products is closely related to the preparation of complex micro-nano structures.In order to improve the electrical,optical and thermal properties of the device,the surface film devices will use three-dimensional(3D)or quash three-dimensional structure instead of 2D plane structure.At present,more and more new surface structures are being developed,which requires higher and higher surface micro-nano structure processing technology.However,the current conventional micro-nano structure processing methods have been difficult to meet the processing needs of complex new surface structures.The traditional surface 3D structure processing method is cumbersome and costly,while the 2D structure processing method is much simpler,and the processing techniques available are also more diverse.This paper proposes a micro-nano structure processing technology based on wrinkle growth behavior Mainly uses laser direct writing technology,combined with wrinkle growth behavior.On the basis of processing the 2D structure,complete the preparation of the 3D micro-nano structure.a large-scale and cheap technology for preparing 3D micro nano structure was invented.In this paper,samples of soft/hard bilayer membranes of different systems are constructed.By introducing thermal stress,wrinkle structures with different periods are obtained.Analyze the wrinkle morphology and discuss the effect of the physical properties of each film on the wrinkle morphology.By using different heat treatment process,to explore the effects of processing on the morphology of wrinkles.By adjusting the film thickness ratio,a wrinkle with a characteristic period of at least 200 nm was prepared on a sample of 5 nm tin/17 nm polystyrene.A transparent conductive wrinkle structure was prepared using indium tin oxide as the surface film.Laser direct writing technology was used to modify the surface film,and two modes of assembling fold structures were explored.One is the Laser Assembly Model I for scanning samples with high-power.It can guide the growth of wrinkles perpendicular to the scanning boundary or inhibit the growth of wrinkles lasers.The second is the Laser Assembly Model II for scanning samples with low power.It can guide the wrinkles to grow along the scanning path,and also can control the amplitude of the wrinkles by reasonably regulating the laser power.Using the method of laser direct writing to assemble wrinkles,this paper studied the preparation of different types of surface micro-nano structures.The arrayed laser scanning method realizes the preparation of a large-area micro-nano structure in a short time.Innovatively use the ordered fold structure to guide the alignment of liquid crystal molecules,and get a better alignment effect.On this basis,some liquid crystal display devices were prepared.This article innovatively uses wrinkle growth behavior as a micro-nano structure processing method.This article innovatively takes the growth behavior of folds as a micro-nano structure processing method.This is a brand-new method for obtaining ordered,controllable,large-area surface 3D micro-nano structures at low cost and high efficiency.It is of great significance for the development and preparation of new micro-nano structures.