Research On Micronano Etching Process On Silincon Surface Based On DPN

With the rapid development of the electronic information age,the applications derived from nanotechnology play an important role in various fields,such as Nano-chips made by nano-electronic technology,cell recognition produced by nano-biotechnology,high-performance materials discovered by nano-material technology and so on.As a kind of nano-processing technology,Dip-pen nanolithography(DPN)technology provides a more diverse development prospect for the progress of nanotechnology because of its convenience,high resolution,wide range of applications and other advantages.In this paper,I explored the fabrication method of micro-nano structure on silicon surface based on DPN technology and the principle of metal catalytic wet etching chemistry.Firstly,I analyzed the reduction reaction mechanism of silver catalytic particles in metal catalytic etching reaction and the etching reaction mechanism of metal catalytic etching.Then,the distribution process of droplets in DPN technology is studied,the diffusion model of droplet radius varying with time is deduced by Fick's second law diffusion equation,and the water-liquid surface liquid bridge force between probe and substrate is deduced by Young-Laplace equation.In addition,a molecular dynamics simulation model is established to simulate the probe no-load experiment and the probe dipping droplet experiment,which provides theoretical guidance for the follow-up operation experiments.Secondly,a nano-scale droplet distribution system is built.According to the requirements of the reduction reaction of silver nanoparticles,the system includes probe micromanipulation module,micro-vision imaging unit,motion control bit unit and signal processing module.At the same time,through the static analysis of the built system,it is found that the nanometer droplet distribution system is stable after 25 minutes.And the calibration experiment of the system is carried out.The practicability of the experimental platform is tested,and the corresponding relationship between the force and displacement of the probe tip in the experimental platform is corrected so that the output voltage of the probe is equal to the change of actual deflection.Finally,the experiments of label cleaning,hydrophilic treatment and pre-distribution of reaction droplets of micron silver-catalyzed nanoparticles were carried out on the silicon substrate,and the reaction droplets were further distributed to the silicon substrate by using the nano-scale droplet distribution system.After annealing at 70 degrees Celsius,individual silver nanoparticles with a size of about 250 nm were formed.After etching,a sunken micro-nano structure was formed on the silicon surface.