| SAW technology has been widely used in radiation radar,sensor system,electronic system,communication system,etc.Aluminum nitride has high sound velocity,high resonance rate,low sound wave attenuation,chemical stability,and has become Material selection.Here,the design and application of surface acoustic wave sensors based on aluminum nitride based on the study of SAW propagation in tubular materials.This paper mainly completes the following work:First,the surface acoustic wave propagation equation combined with piezoelectric theory is based on the delta function model of the interdigital transducer,and its three-dimensional model based on COMSOL software is simulated to observe and analyze its transient stress Simplify it to a two-dimensional model.After that,we simulated the surface acoustic wave model of a pair of interdigitated electrodes,obtained the frequencies in resonance and anti-resonance modes,and calculated the phase velocity of aluminum nitride to be about V_r=5798.3m/s.Then the simulation simulates the changes of the resonant and anti-resonant frequencies of the surface acoustic wave when the device structure is changed.The substrate thickness is non-linearly negatively correlated,which provides a theory and method for the design and application of surface acoustic waves in the engineering direction.At the end of this paper,the surface acoustic wave pressure sensor loaded with pressure and the surface acoustic wave gas sensor at different concentrations are simulated,and it is concluded that there is a good linear relationship between the two and the resonance frequency of the surface acoustic wave.The relationship between the output frequency and pressure of the wave pressure sensor can be expressed as y=144.59-0.01784x,and the relationship between the output frequency of the SAW gas sensor and the gas concentration can be expressed as y=1.4398×10~8-140849x,which is the acoustic surface The wave sensor provides a certain theoretical guidance. |
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