Preparation And Study On Plasmonic And The Optical-Electrical Properties Of Indium-Tin Alloy Thin Film

With the development of science and technology,indium tin alloy has been a significant material in preparing transparent conductive oxide(TCO)films in recent years.It has been extensively applied in fields such as aerospace and electronic techniques.There is a few reports on the preparation of preferred orientation and study of its properties.Therefore,it is of great significance to study its preparation,growth mechanism and optical-electrical properties,which shows great importance in semiconductor industry.In addition to the above properties,indium tin alloy thin film also show property of localized surface plasmon resonance(LSPR),which is referred to that metallic nanoparticles(NPs)are excited by incident light with a certain frequency.Interestingly,a number of other metals(i.e.,Li,Na,Al,Cu,and In)also meet this criterion and may possibly support LSPR for at least part of the UV-vis-near-IR region,but there has been far less experimental work with these metals.Besides,currently there is a few reports on the In-Sn alloy thin film.In this paper,we first studied the preparation methods and conditions of indium tin alloy thin film.Then we investigated the optical-electrical and LSPR properties of In-Sn-based composite thin films.All of the above studies will play an important role in the research of new LSPR materials.Therefore,this paper has carried out a targeted study as followings:(1)In-Sn alloy thin films with same thicknesses were prepared by electron-beam evaporation;electron-beam irradiation with different irradiation time and same powers was used to explore its optical-electrical and LSPR properties.(2)As the surface dielectric layer in ITO/In-Sn bilayer structure,ITO was used to realize the LSPR tunability.It is found that the surface plasmon resonance wavelength was red shifted with the increase of In-Sn layer thickness when the thickness of ITO was constant and that the redshift was more obvious with the increase of ITO thickness in each experiment.(3)The Au/ITO bilayers and ITO/Au/ITO trilayers were prepared by electron-beam evaporation technique,and their optical-electrical properties were investigated under the effect of electron-beam irradiation with same power and time.