Research Of 5-DOF Vacuum Processing Platform Based On Series-Parallel Hybrid

The platform mainly consists of two modes connection of series and parallel.The serial and parallel platform has its advantages and disadvantages: The parallel platform has the advantages of high stability,high precision,high rigidity,strong bearing capacity,easy to close loop control,and small accumulated error;the serial platform has the advantages of large range of motion,easy solution,fast response,simple control and low cost.According to the needs of the project,A series-parallel hybrid 5-DOF vacuum processing platform is designed,the platform is composed of a 3-RPS parallel mechanism and a two degree of freedom serial mechanism,and the characteristics of the platform are studied.Through the relevant literature at home and abroad,the kinematics of the 3-RPS parallel mechanism is analyzed,a solution algorithm based on spatial geometry knowledge is proposed,and the algorithm is verified by an example.According to the requirements of the platform,a five axis synchronous control strategy is selected through the experimental analysis and verification.On the basis of customer requirements,the completion of the platform control program,the software converts the input data into the driver's identifiable data by the positive and negative solution algorithm,the platform can realize five axis synchronous trajectory movement,single axis and multi axis debugging movement and the pre detection movement.After completing the design,processing,installation and debugging of the platform,the platform related design parameters are verified by experiments.The results show that the platform has good heat dissipation under vacuum,The translational positioning accuracy and repeatability of the platform is better than 10?m,the rotation positioning accuracy and repeatability of the platform is better than 10?.