Delayed Position Feedback For The Vibration Of A Class Of Electro-actuated Micro Accelerometers

In this paper,a dynamic model of an electrostatic driven bipolar parallel plate capacitive microcharger is taken as the object of study.The device is driven by DC bias voltage and AC voltage.The Amplitude Change of the System Based on Local Bifurcation Theory.Based on the global bifurcation theory,the microstructures are caused by the vibration and jumping phenomena caused by the loaded DC bias voltage and the AC excitation voltage.Furthermore,it is proposed to suppress the chaotic motion,jumping phenomenon and the realization of the unsteady phenomenon caused by the driving voltage by the time delay displacement feedback.First consider the dynamic system equation,using the lumped parameter method to model,for the convenience of research,the system parameters are dimensionless.And then the critical value of the system structural parameters under static occlusion is analyzed.The bifurcation equation of the system is deduced by multi-scale method.The singularity theory is used to verify the stability of the solution of the system.The Hopf bifurcation of the dynamical system And the complex dynamical behavior of the system under different system parameters is verified by the fourth-order Rung-Kutta method to verify the validity of the analytical results.Sixth,the final numerical simulation is based on the positive gain parameter and the micro-The control of the system is not stable control changes.It is found that with the increase of driving voltage,the jumping phenomenon,chaos and suction instability of the system are caused.Through the positive feedback gain coefficient and the smaller delay time,the delay displacement feedback is loaded on the driving AC voltage,which can play the suppression system chaotic motion and the safety basin erosion phenomenon,namely the time delay displacement feedback for the original system The complex dynamics state has a controlling effect.The results of this paper have potential application value in the design of micro-accelerometer and the development of controller.