Study On Fabrication Of Nicr Films Based High Temperature Resistance Strain Gauge And Its Temperature Characteristics On The Superalloy Substrate

As the core component of the spacecraft,aero-engine would be effected by elevated temperature,high pressure,violent vibrations that would be cause engine damage between long work time.By using thin film depositing technology measuring high temperature environment of aero-engine is a problem.Thin film strain gauge has the advanrages of fast response,high sensitivity resisitant.The strain gague sensitivity marterial can be directly deposited on surface by using sensitive gate thin film technology.Compared with the traditional strain gauge,it has the advantages of high temperature resistance and high pressure resistance.Inocel 600 Ni-based alloy is ideal for strain gauge which have excellent heat resistance,high pressure resistance and oxidation resistance.It is an ideal alloy material for Ni-Cr series,Inocel 600 Ni-based alloy thin film strain gauge can be used to test the high temperature components of aeroengine parts.This paper designed a kind of high temperature NiCr thin film strain gauge on the Inocel600 Ni-based alloy substrate which can work under 600?.By using DC-PMS,we deposited SiO2 insulating film,NiCr sensitive grid film,SiOxNy and ITO films on the Inocel 600Ni-based alloy aubstrate.To adopt photolitography to make strain covering film,we finished the preparation of high temperature of NiCr thin film strain gauge.Through the test to explore the optimum process parameters.And then measure the performance characterization of NiCr film and film.The NiCr films were heat treated with different temperature,study on NiCr thin film strain gauge high temperature characteristics.The thin film sample that deposited SiN_xO_y and ITO film on the surface,then tested the sample by XRD and SEM.The test shows that there's no NiO diffraction peak in NiCr thin film,the structure and properties of NiCr films did not change.SiN_xO_y and ITO thin film provide protection for high temperature resistance and oxidation resistance under 600?.Explore the NiCr thin film strain gauge high temperature heat output curve,the heat output curve is a smooth curve,with the increase of temperature of thin film heat output of strain gauge larger values.The TCR of this high temperature strain gauge is 80~787ppm/k in 50~350?,the strain sensitivity coefficient is 1.194528,mechanical hysteresis is 5.02290444.