Research On New Type Of Non-resonant Piezoelectric Actuator And Its Application In Precision Stage

Since the 21 st century,with the rapid development of science and technology,higher and higher requirements have been placed on positioning accuracy in many engineering fields.In the fields of semiconductor manufacturing,surface testing technology,biotechnology,medical engineering,optical fiber operation,and optics,the accuracy of positioning systems even needs to reach nanometer scale.In addition,the quick response speed and ability to work normally under extreme working conditions such as high vacuum and large temperature difference range are often demanded.This research topic is based on the above background,using non-resonant piezoelectric motors as the core research object,and combining piezoelectric precision actuating techniques,focusing on the principle and implementation method of non-resonant piezoelectric motors and multi-degree-of-freedom high-precision motion platforms..A brief introduction to the development status of serial and parallel macro motion platforms and precision platforms is presented.The current research status of non-resonant piezoelectric motors is introduced.The main physical performance parameters of piezoelectric ceramics and piezoelectric stacks are introduced.The use of the electric stack,preliminary experiments on the performance of the piezoelectric stack,to prepare for the follow-up piezoelectric actuator and multi-freedom precision platform experiments;A dual flexible hinge-guided non-resonant piezoelectric actuator was designed.A piezoelectric stack was used as the core element in the actuator.A specific drive signal was applied to the stack to achieve alternate stepping motion of the two driving feet.;Prototype speed characteristics,positive and negative speed consistency,load characteristics and displacement resolution and other experiments,analysis of experimental results,draw conclusions.The scheme of the non-resonant piezoelectric actuator of the rhombic mechanism is given by its small size,low cost,easy control,and excellent performance.The single piezoelectric stack is used as the driving source.The design scheme of the diamond structure is introduced.Experiments on the speed characteristics and displacement resolution of the prototype are performed.The experimental results are analyzed and conclusions are drawn.Based on the researched double soft hinge-guided piezoelectric actuator prototype,a two-degree-of-freedom series platform was set up.The speed and accuracy of the prototypes were tested and the performance of the platform prototype was grasped.Based on rhomboidal inertial stick-slip piezoelectric actuator prototype,a parallel three-degree-of-freedom platform is constructed.The working process of the platform is described.The translation accuracy and rotation accuracy of the platform are studied.Summarize the main contents of the research work,innovations,and problems to be solved,and propose the direction for the next step of research.