Research On Design And Testing Technology Of Atomic Force Microscope Nano-level Positioning Platform

Nanotechnology plays an increasingly important role in the development of modern society.The development of nanotechnology is inseparable from high-resolution surface analysis tools.With its ultra-high resolution,atomic force microscopy has become a powerful tool for researching nanotechnology in various fields.It has a wide range of applications,which can be used not only for the study of surface structure,surface tribology and material mechanics,electrical properties,but also for atomic manipulation and nanoscale processing of materials.Nano-positioning platform is the core component of atomic force microscopy,which directly determines the resolution performance of atomic force microscopy.In this thesis,a series of researches have been done on the atomic force microscope nano-positioning platform to realize the millimeter-scale stroke and nano-scale precision,the piezoelectric drive circuit of the shear-type displacement platform and the test technology.The following studies have been carried out:Based on the analysis of the principles of atomic force microscopy and piezoelectric ceramic actuator,the overall design of the nanopositioning platform was proposed.The platform combines the shearing piezoelectric displacement platform with the piezoelectric ceramic scanner.The structural of the shearing piezoelectric displacement platform was designed,and the static and modal analysis of the model was carried out.The displacement,stress,strain and natural frequency of the model were verified.According to the scanning requirements,the structural parameters of the piezoelectric ceramic scanner were designed and carried out.Modal analysis ensures that the operating frequency meets the design requirements.In order to ensure the accuracy and performance of the displacement,the driving circuit of the piezoelectric ceramic group was designed and verficated,and a piezoelectric driving circuit with stable output performance and high voltage precision was designed.According to the system performance requirements,the overall design and parameters were determined.The AC-to-DC circuit,the frequency-adjustable sawtooth signal generator and the high-voltage signal amplifier module were compared to demonstrate the loop performance through different schemes.Loop design was reasonable and reliable verificated by the multisim.The appropriate circuit composition were choosed to complete the design requirements of the piezoelectric drive circuit system.The designed nano-positioning platform was directly tested by the built test system.Since the designed positioning platform was not integrated with the atomic force microscope,the ultra-high vacuum atomic force microscope was used to study the nano-positioning platform test technology.Proximity probes and high-resolution imaging are instructive for the integration testing.