Structure Design And Error Analysis Of Parallel Double Joint Coordinate Measuring Machine

Double parallel joint coordinate measuring machine is a kind of non-orthogonal coordinate measuring device using precision angle sensor to realize coordinate measurement in the two-dimensional plane of X-Y.The measurement arm with long grating can vertically move in the direction of Z axis to achieve precise positioning of Z axis coordinate.Parallel double joint coordinate measuring machines are widely used in aerospace,semiconductor,precision machinery and other fields due to their high accuracy and portability.According to the technical specifications and requirements of the parallel double joint coordinate measuring machine,the key technology of this instrument is studied and the design and assembly of the principle prototype are realized.The specific work includes:by using SOLIDWORKS software the overall scheme of coordinate measuring machine is designed;the analysis and design of the two axis of rotation is the key of the whole design;by using ANSYS software the connecting arm structure is simulated;the motion model of the coordinate measuring machine is confirmed by using Denavit-Hartenberg(D-H)modeling method;the error source that affects the measuring accuracy of parallel double joint coordinate measuring machine is analyzed and the parts that affect the accuracy of coordinate measuring machines with larger errors are tested,also the errors in the test parts are separated and corrected;by using standard block and standard ring gauge the principle prototype is calibrated and the accurate calibration parameters of coordinate measuring machine model is realized.