Simulation Study On Microscopic Characteristics Of Supercritical Carbon Dioxide And Pollutant Removal

With the advancement of science and technology,manufacturing-oriented equipment and instruments are developing towards the direction of structural micromation and circuit integration.the instrument will inevitably be contaminated during processing and daily use,which will affect the accuracy of the instrument.There are many shortcomings in traditional cleaning techniques such as insufficient cleaning and base will be destroyed during cleaning.Currently,green cleaning technology that uses Super Critical Carbon Dioxide to clean metal particles and organic particles on the surface of the substrate is receiving more and more attention.Therefore,it is necessary to study the characteristics of Super Critical Carbon Dioxide and the influence of Super Critical Carbon Dioxide on organic pollutants and metal particle pollutants.Because of the mechanism of action of Super Critical Carbon Dioxide on metal particles and organic particles is not consistent,this paper uses two different methods to analyze the problem.When removing organic particles,consider the function dissolution of Organic Compounds by Super Critical Carbon Dioxide to remove organic particles,using Materials Studio molecular dynamics software to simulate the physical properties of Super Critical Carbon Dioxide at different temperatures and pressures,and then simulate the dissolution of organic matter in Super Critical Carbon Dioxide,analyze the mechanism of removal of organic matter by Super Critical Carbon Dioxide,and further deepen the understanding of the principle of Super Critical Carbon Dioxide removal.The rate of removal of organic matter in the early stage is related to the environmental pressure and the molecular weight of organic matter.Finally,the organic matter can be uniformly diffused into the carbon dioxide atmosphere.The removal mechanism is related to hydrogen bonding and electrostatic interaction.The organic pollutants on the surface of the substrate are replaced by carbon dioxide.When removing metal particles,consider the affect of Super Critical Carbon Dioxide on the particles to carry away the particles attached to the substrate,first analyze the adhesion when metal particles adhere to the base,and then use COMSOL Multiphysic software to the physical properties of simulate supercritical carbon dioxide,the continuum model is applied to the supercritical carbon dioxide in the fluid domain,and the sliding boundary conditions are applied to the surface of the metal particles,and analyze the driving force of a certain diameter copper particle under different conditions,the driving force is closely related to pressure,temperature and flow rate,the resulting driving force is compared with the calculated adhesion to select a better cleaning condition.The above research has positive significance for the development of supercritical carbon dioxide green cleaning technology in practical engineering applications.