Micro Flow Field Parameter Measuring Instrument Of Flat Pad Aerostatic Restrictor

At present,the research of gas hydrostatic bearing technology has become a key factor in ultra-precision machining technology and the key of breakthrough of gas hydrostatic bearing technology is to explore the parameters distribution of gas film micro-flow field.Aiming at the lack of integrated measuring devices of flow field parameters of gas hydrostatic throttle at home and abroad and the low degree of devices now,this paper developed a high precision data automatic measuring instrument of paraments of gas film micro-flow field,and observed and analyzed characters of the parameter distribution.The main research works are as follows:(1)The overall function of the device for exploring the micro-flow field parameters of the planar hydrostatic throttle is analyzed by referring to the relevant literature and combining with the needs of the project,the main measurement parameters and technical index of the gas film micro-flow field are defined,and the overall scheme design is completed.(2)The mechanical device and hardware circuit for measuring parameters of gas film field are designed and built.The optimal device scheme is designed and implemented with the mechanical factors such as the installation and moving device of throttle,the size and bearing capacity of working platform guide rail,the size and installation of sensor and adjusting of whole device and the hardware circuit factors such as actual sensors selection,electric two-dimensional guide rail and moving track of working platform.(3)The software program for parameters measurement device of gas film micro-flow field are designed and debugged.Using mixed programming mode of upper and lower computer,the functions of lower computer software such as parameter measurement and display,storage,motion control of two-dimensional working platform and touch screen interface and lower computer software such as image generation of two-dimensional parameter distribution are designed and debugged.(4)The installation and debugging of the whole measuring platform are completed.The debugging results show that the return error and the moving distance of the working platform the device meet the working requirements.The experimental results show that the pressure at the throttle orifice,the pressure at the equalizing groove and the pressure at the rest of the gas film field decrease in turn,and the overall pressure of the gas film field decreases with the increase of gas film thickness.The temperature at the throttle orifice decreases sharply compared with the other parts in the film field,and the overall temperature of the gas film field decreases with the increase of gas film thickness.