| The continuous expansion of the application field of ultrasonic motors has also put forward higher requirements for piezoelectric ceramics.For a long time,the research and development of high-performance piezoelectric ceramics has mainly centred on PZT piezoelectric ceramics.It is noticeable that PZT–PMS ternary piezoelectric ceramics exhibit high mechanical quality factor and electromechanical coupling coefficient near the morphotropic phase boundary,which is considered as a piezoelectric ceramic material with high-power application prospect.In order to further improve the piezoelectric properties,PZT–PMS–PIN quaternary high-power piezoelectric ceramics is prepared on the basis of PZT–PMS ternary piezoelectric ceramics,and their phase structure,electrical properties,Curie temperature and high-power propertie are characterized.In addition,in order to solve the difficult problem of processing the annular piezoelectric ceramic used in the large-diameter traveling-wave rotary ultrasonic motor,this paper also explores the process of tape casting to prepare annular PZT–PMS–PIN piezoelectric ceramic used in TRUM–60 ultrasonic motor.In order to determine the optimum sintering temperature range of PZT–PMS–PIN piezoelectric ceramics,the effects of different sintering temperatures on the phase structure,microstructure and piezoelectric properties of 0.94Pb(Zr0.5Ti0.5)O3–0.05Pb(Mn1/3Sb2/3)O3–0.01Pb(In1/2Nb1/2)O3piezoelectric ceramics are investigated.The test results show that the piezoelectric ceramics have the best performance when the sintering temperature is 1150°C,and the performance is:d33=432pC/N,kp=0.62,?r=1690,tan?=0.0040,Qm=1322,Ec=13.5kV/cm,Pr=11.921mC/cm2.?0.95-x?Pb?ZryTiz?O3–0.05Pb(Mn1/3Sb2/3)O3–xPb(In1/2Nb1/2)O3?x=0.01mol,0.03mol,0.05mol,0.07mol;y/z=46/52,48/52,50/50,52/48,54/46?piezoelectric ceramics are prepared by two-step precursor method and the phase structure and related properties are studied.The experimental results show that the transition of the rhombohedral phase to the tetragonal phase occurs in the four series of components with the PIN content between 0.01 mol and 0.07 mol with the decrease of zirconium-titanium ratio,indicating the existence of the morphotropic phase boundary region.In terms of piezoelectric properties,when the content of PIN is 0.01 mol and 0.03mol,the quaternary system has the best piezoelectric performance at zirconium-titanium ratio 50/50.And when the content of PIN is 0.05 mol and 0.07 mol,the composition with the best piezoelectric properties is obtained at a zirconium-titanium ratio of 48/52.That is to say,as the PIN contentincreases,the morphotropic phase boundary region of the?0.95-x?PZT–0.05PMS–x PIN piezoelectric ceramic gradually shifts toward the lower zirconium-titanium ratio side.In addition,the tand of the(0.95-x)Pb?ZryTiz?O3–0.05Pb(Mn1/3Sb2/3)O3–xPb(In1/2Nb1/2)O3 system is substantially below 0.5%,and the Qm is above 1000,exhibiting excellent high-power piezoelectric ceramic characteristics.The high-power test results show that the maximum vibration rate of the piezoelectric ceramic with the PIN content of 0.01 mol and Zr/Ti=50/50 is up to 0.78 m/s??T=20°C?,significantly higher than that of the commercial high-power piezoelectric ceramic PZT–8?0.40 m/s?.The annular PZT–PMS–PIN piezoelectric ceramic used in TRUM–60 ultrasonic motor is fabricated by tape casting method.The whole process including the preparation of slurry,casting,ceramic green sheet lamination,hot pressing,degumming sintering,ceramic cutting and partition polarization is explored,and relevant process parameters are obtained. |
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