| The Quadrupole Mass Filter?QMS?is one of the most important parts in mass spectrometry?MS?,which is widely used in the analysis area.The geometrical feature has important effect on performance of MS.The QMS includes four poles and two cylindrical housings.It is difficult to measure the geometrical feature of them.The paper discuss the method of measuring geometrical feature of QMS,it will be helpful for the manufacture of QMS.Anequipment is developed to meet the need of measuring the diameter of pole on line,and U95of it is equal 0.2?m when k=2.Other parameters such as radius,straightness,cylindricity are measured by the other equipments.Another sets also used to measure the distance of two hole which is face to face in cylindrical housings.It is helpful forchosing cylindrical housings.The assembly errors of the field circle which is formed by four roles is the key parameter,but field circle is not real.the paper use a new phrase called“total geometrical error”?TGE?to describe the geometrical feature of the field circle and develop the algorithm to evaluate it according the measuring datum.According to the algorithm of calculate“total geometrical error”?TGE?,distance between poles need to be measured.We develop an instrument to measure the distance between generatrix of poles instead of measuring it from outside,only it can reflect the error of field circle.It is suitable for measuring a series of QMS whose field circle has different radius.After the instrument is developed on the base of error analysis,the statistics datum of experiments show that U95 is equal 0.3?m.The measuring result is the same as the report of one QMS manufactured by foreign company when it is measured by the developed instrument.From the research of this paper,the keygeometrical parameters needed to be measured of QMS are discussed and achieved,these remarkable improve the success of manufacture,the test results of MS alse validate the accuracy of QMS made by the task. |
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